Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)

Profile card (PDF)

SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.

Publications:

• LAMB-CAMARENA, S.; PORRATI, F.; KUPRAVA, A.; WANG, Q.; URBÁNEK, M.; BARTH, S.; MAKAROV, D.; HUTH, M.; DOBROVOLSKIY, O., 2023: 3D Magnonic Conduits by Direct Write Nanofabrication. NANOMATERIALS 13(13), doi: 10.3390/nano13131926; FULL TEXT
  (MIRA-EBL, EVAPORATOR, BRILLOUIN)
• Klíma, J., 2023: Spin waves in non-trivial magnetic landscapes. BACHELOR´S THESIS , p. 1 - 69; FULL TEXT
  (MIRA-EBL, LYRA, ICON-SPM, KERR-MICROSCOPE, BRILLOUIN, EVAPORATOR)
• BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: Downsizing the Channel Length of Vertical Organic Electrochemical Transistors. ACS APPL MATER INTER 15(22), p. 27002 - 8, doi: 10.1021/acsami.3c02049; FULL TEXT
  (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
• Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy. REVIEW OF SCIENTIFIC INSTRUMENTS 94(5), doi: 10.1063/5.0139027; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
• WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)

• GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
  (ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
• ROVENSKÁ, K.; LIGMAJER, F.; IDESOVÁ, B.; KEPIČ, P.; LIŠKA, J.; CHOCHOL, J.; ŠIKOLA, T., 2023: Structural color filters with compensated angle-dependent shifts. OPTICS EXPRESS 31(26), p. 43048 - 9, doi: 10.1364/OE.506069; FULL TEXT
  (EVAPORATOR, MIRA-EBL, RIE-CHLORINE, ALD, SNOM-NANONICS, TUBE-FURNACE)
• GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: Strongly Coupled Plasmon and Phonon Polaritons as Seen by Photon and Electron Probes. PHYSICAL REVIEW APPLIED 19(2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042; FULL TEXT
  (MIRA-EBL, EVAPORATOR, FTIR)
• NOVCIC, K.; IFFELSBERGER, C.; PALACIOS CORELLA, M.; PUMERA, M., 2023: Solvents dramatically influence the atomic composition and catalytic properties of Ti3C2Tx MXenes. JOURNAL OF MATERIALS CHEMISTRY A 11(25), p. 13419 - 13, doi: 10.1039/d3ta01441j; FULL TEXT
  (MIRA-EBL, KRATOS-XPS)
• ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor. CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471; FULL TEXT
  (RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)
• Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR´S THESIS , p. 1 - 44; FULL TEXT
  (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
• MILOSAVLJEVIĆ, V.; KOŠARIŠŤANOVÁ, L.; DOLEŽELÍKOVÁ, K.; ADAM, V.; PUMERA, M., 2022: Microrobots with Antimicrobial Peptide Nanoarchitectonics for the Eradication of Antibiotic-Resistant Biofilms. ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 32(43), p. 1 - 11, doi: 10.1002/adfm.202112935; FULL TEXT
  (LEICACOAT-NANO, MIRA-EBL, MIRA-STAN, KRATOS-XPS)
• Fridrišek, T., 2022: Optical gating of epitaxial graphene. MASTER´S THESIS
  (MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR´S THESIS , p. 1 - 60; FULL TEXT
  (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
• Turčan, I., 2022: Magnetism in curved geometries. PH.D. THESIS , p. 1 - 117; FULL TEXT
  (LYRA, BRILLOUIN, ICON-SPM, MIRA-EBL, KERR-MICROSCOPE, HELIOS)
• Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113; FULL TEXT
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: Active Light-powered antibiofilm ZnO micromotors with chemically programmable properties. ADVANCED FUNCTIONAL MATERIALS 31(27), p. 1 - 10, doi: 10.1002/adfm.202101178; FULL TEXT
  (MIRA-EBL, RIGAKU9, KRATOS-XPS)
• Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER´S THESIS , p. 1 - 76; FULL TEXT
  (MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, KRATOS-XPS, SNOM-NANONICS, LYRA, ICON-SPM)
• Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS , p. 1 - 100; FULL TEXT
  (KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8, ICON-SPM)
• Idesová, B., 2021: Plasmonically active nanostructures for optical filtering. BACHELOR´S THESIS , p. 1 - 47; FULL TEXT
  (EVAPORATOR, MIRA-EBL, FTIR)
• Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER´S THESIS , p. 1 - 78; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
• Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS ; FULL TEXT
  (NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD, EVAPORATOR, MIRA-EBL, MPS150)
• KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8(4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222; FULL TEXT
  (EVAPORATOR, MIRA-EBL, WITEC-RAMAN, WOOLLAM-VIS)
• Wojewoda, O., 2020: Phase-resolved Brillouin light scattering: development and applications. MASTER´S THESIS ; FULL TEXT
  (BRILLOUIN, EVAPORATOR, MIRA-EBL, KERR-MICROSCOPE, LYRA, ICON-SPM)
• Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS , p. 1 - 104; FULL TEXT
  (MIRA-EBL, RAITH, EVAPORATOR, SNOM-NANONICS, ICON-SPM)
• KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
  (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
• Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS , p. 1 - 129; FULL TEXT
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
• LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326; FULL TEXT
  (EVAPORATOR, RIE-FLUORINE, MIRA-EBL, LYRA, ICON-SPM)
• Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 5, doi: 10.1063/5.0013692; FULL TEXT
  (EVAPORATOR, KERR-MICROSCOPE, BRILLOUIN, MIRA-EBL, LYRA, ICON-SPM)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
  (LITESCOPE-LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER´S THESIS , p. 1 - 55
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, VERSALAB, ICON-SPM)
• Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
  (MAGNETRON, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB, ICON-SPM)
• Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
  (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: High-Resolution Quantitative Phase Imaging of Plasmonic Metasurfaces with Sensitivity down to a Single Nanoantenna. NANO LETTERS 19(2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776; FULL TEXT
  (EVAPORATOR, MIRA-EBL, VERIOS)
• DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
  (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
• ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
  (MIRA-EBL, MAGNETRON, LYRA)
• Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
  (ALD, DIENER, EVAPORATOR, MIRA-EBL, PECVD, TERS, WIRE-BONDER)
• Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
  (MIRA-EBL, EVAPORATOR, FTIR)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
  (HELIOS, MIRA-EBL, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE, LYRA, ICON-SPM)
• HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
  (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR´S THESIS , p. 1 - 26
  (DWL, MIRA-EBL, WIRE-BONDER, EVAPORATOR)
• PROCHÁZKA, P.; MAREČEK, D.; LIŠKOVÁ, Z.; ČECHAL, J.; ŠIKOLA, T., 2017: X-ray induced electrostatic graphene doping via defect charging in gate dielectric. SCIENTIFIC REPORTS 7, p. 1 - 7, doi: 10.1038/s41598-017-00673-z; FULL TEXT
  (MIRA-EBL, DIENER, ALD, WIRE-BONDER)
• BABOCKÝ, J.; KŘÍŽOVÁ, A.; ŠTRBKOVÁ, L.; KEJÍK, L.; LIGMAJER, F.; HRTOŇ, M.; DVOŘÁK, P.; TÝČ, M.; ČOLLÁKOVÁ, J.; KŘÁPEK, V.; KALOUSEK, R.; CHMELÍK, R.; ŠIKOLA, T., 2017: Quantitative 3D phase imaging of plasmonic metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 9, doi: 10.1021/acsphotonics.7b00022; FULL TEXT
  (MIRA-EBL, EVAPORATOR, LYRA)
• Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 48
  (TITAN, MIRA-EBL, EVAPORATOR, WIRE-BONDER, CRYOGENIC, ICON-SPM)
• Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 47
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, LYRA, ICON-SPM)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• BABOCKÝ, J.; DVOŘÁK, P.; LIGMAJER, F.; HRTOŇ, M.; ŠIKOLA, T.; BOK, J.; FIALA, J., 2016: Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34(6), p. 06K801-1 - 4, doi: 10.1116/1.4966959; FULL TEXT
  (MIRA-EBL)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
• Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS , p. 1 - 52
  (UHV-MBE, VERIOS, MIRA-EBL, ALD, LYRA)
• URBÁNEK, M.; UHLÍŘ, V.; LAMBERT, C.; KAN, J.; EIBAGI, N.; VAŇATKA, M.; FLAJŠMAN, L.; KALOUSEK, R.; IM, M.; FISCHER, P.; ŠIKOLA, T.; FULLERTON, E., 2015: Dynamics and efficiency of magnetic vortex circulation reversal. PHYSICAL REVIEW B 91(9), p. 094415-1 - 11, doi: 10.1103/PhysRevB.91.094415; FULL TEXT
  (MIRA-EBL, WIRE-BONDER, LYRA)
• Břínek, L., 2015: Application of Plasmon Polaritons in Nanophotonics. PH.D. THESIS , p. 1 - 75
  (FTIR, MIRA-EBL, TERS, LYRA)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
  (MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD, LYRA)