High vacuum coating system for electron microscopy Leica Microsystems EM ACE 600 (LEICACOAT-NANO)


Guarantor:
Vojtěch Švarc

Instrument status:
Operational Operational, 28.8.2023 14:30

Equipment placement:
CEITEC Nano - C1.20


High vacuum coater for deposition of conductive coatings on SEM and TEM samples. Processes are driven by bulit-in microprocessor control unit and are fully automatized. Process steps and parameters are set through a touch screen. Equipped with Au sputter target and carbon thread evaporation source as standard.
Other available targets for the sputtering are: Cr, W, Co, Ti, Al, Pt/Pd.


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