Magnetron sputtering system BESTEC (MAGNETRON)

Profile card (PDF)

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.

Publications:

• Fawaeer, S. H.; Horník, V.; Al-Qaisi, W. M.; Sedláková, V.; Mousa, M. S.; Knápek, A.; Sobola, D., 2026: . SURFACES AND INTERFACES 86, doi: 10.1016/j.surfin.2026.108769; FULL TEXT
  (KRATOS-XPS, RIGAKU3, HELIOS, VERIOS, WOOLLAM-VIS, VERSALAB, ICON-SPM, MAGNETRON)
• HAJDUČEK, J.; ANDRIEUX, A.; ARREGI URIBEETXEBARRIA, J.; TICHY, M.; CATTANEO, P.; FERRARI, B.; CARBONE, F.; UHLÍŘ, V.; LAGRANGE, T., 2026: Dislocation-driven nucleation type switching across repeated ultrafast magnetostructural phase transition. PHYSICAL REVIEW B 113(1), doi: 10.1103/k8nj-p557; FULL TEXT
  (MAGNETRON, RIGAKU9, VERSALAB, WOOLLAM-VIS)
• HAJDUČEK, J.; LECCESE, V.; RUSZ, J.; ARREGI URIBEETXEBARRIA, J.; SAPOZHNIK, A.; ŠTINDL, J.; BARANTANI, F.; CATTANEO, P.; ANDRIEUX, A.; CARBONE, F.; UHLÍŘ, V.; LAGRANGE, T., 2026: Sub-10-nm quantification of spin and orbital magnetic moment across the metamagnetic phase transition in FeRh using EMCD. PHYSICAL REVIEW MATERIALS 10(1), p. 1 - 11, doi: 10.1103/m3vy-18hn; FULL TEXT
  (MAGNETRON, RIGAKU9, VERSALAB)
• FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; MOUSA, M.; KNÁPEK, A.; SOBOLA, D., 2026: Non-epitaxial integration of strain-tuned polycrystalline BiFeO3 thin films for silicon-based optoelectronics. OPTICAL MATERIALS 169, doi: 10.1016/j.optmat.2025.117577; FULL TEXT
  (RIGAKU3, VERIOS, ICON-SPM, WOOLLAM-VIS, MAGNETRON, KRATOS-XPS)
• FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; MOUSA, M.; KNÁPEK, A.; SOBOLA, D., 2026: Role of Buffer Layers in Defect Chemistry and Parasitic Phase Formation of BiFeO3 Films on Silicon. ACS OMEGA 11(5), p. 7782 - 7795, doi: 10.1021/acsomega.5c08852; FULL TEXT
  (RIGAKU3, VERIOS, UHV-PLD, MAGNETRON, KRATOS-XPS)

• DODD, S.; GUDINO, N.; ZADOROZHNII, O.; STAŇO, M.; HAJDUČEK, J.; ARREGI URIBEETXEBARRIA, J.; MORRIS, H.; UHLÍŘ, V.; BARBIC, M.; KORETSKY, A., 2025: Field switching of microfabricated metamagnetic FeRh MRI contrast agents. SCIENTIFIC REPORTS 15(1), p. 1 - 10, doi: 10.1038/s41598-025-85384-6; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA-EBL, EVAPORATOR, RIE-FLUORINE, ICON-SPM, KERR-MICROSCOPE)
• Mattern, M.; Zeuschner, SP.; Rössle, M.; Arregi, JA.; Uhlir, V.; Bargheer, M., 2025: Non-thermal electrons open the non-equilibrium pathway of the phase transition in FeRh. COMMUNICATIONS PHYSICS 8(1), doi: 10.1038/s42005-025-02066-5; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9)
• Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• MOZALEV, A.; BENDOVÁ, M.; KALINA, L.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E., 2025: MoOx-based high-density nanoarrays on a substrate via smart anodizing as novel 3D electrodes for nano-energy applications. JOURNAL OF MATERIALS CHEMISTRY A 13(25), p. 19605 - 19622, doi: 10.1039/d5ta02921j; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• FOLTÝN, M.; ŠIKOLA, T.; HORÁK, M., 2025: Bismuth Plasmonic Antennas. ACS NANO 19(36), p. 32299 - 32305, doi: 10.1021/acsnano.5c07482; FULL TEXT
  (MAGNETRON, HELIOS, TITAN)
• PECHEUX, A.; SALVATORE, R.; THEVENARD, L.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; ALMANZA, M.; FOURNIER, D.; GOURDON, C.; LOBUE, M., 2025: Near complete laser-induced modulation of the ferromagnetic-antiferromagnetic phase fraction in FeRh films. PHYSICAL REVIEW B 112(13), doi: 10.1103/fytj-vy5c; FULL TEXT
  (MAGNETRON, RIGAKU9, VERSALAB)
• BENDOVÁ, M.; PRÁŠEK, J.; MOZALEV, A., 2025: XPS characterization of Mo-Nb mixed-oxide nanorod arrays via the anodizing of thin Al/Mo-Nb-alloy bilayers on substrates. NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS , p. 272 - 277, doi: 10.37904/nanocon.2024.4993; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• Děcký, M., 2025: . MASTER'S THESIS , p. 1 - 63; FULL TEXT
  (MIRA-EBL, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, MPS150, LYRA, LASER-DICER)
• FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; MOUSA, M.; KNÁPEK, A.; SOBOLA, D., 2025: Substrate-temperature-driven phase stabilization and strain modulation in BiFeO3/Ti/Si heterostructures for scalable silicon integration. JOURNAL OF ALLOYS AND COMPOUNDS 1047, doi: 10.1016/j.jallcom.2025.184949; FULL TEXT
  (VERIOS, ICON-SPM, WOOLLAM-VIS, KRATOS-XPS, RIGAKU3, VERSALAB, MAGNETRON)
• Castellano, A.; Alhada-Lahbabi, K.; Arregi, JA.; Uhlir, V.; Perrin, B.; Gourdon, C.; Fournier, D.; Verstraete, MJ.; Thevenard, L., 2024: . PHYSICAL REVIEW MATERIALS 8(8), doi: 10.1103/PhysRevMaterials.8.084411; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, WOOLLAM-VIS)
• OURDANI, D.; CASTELLANO, A.; VYTHELINGUM, A.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; PERRIN, B.; BELMEGUENAI, M.; ROUSSIGNÉ, Y.; GOURDON, C.; VERSTRAETE, M.; THEVENARD, L., 2024: . PHYSICAL REVIEW B 110(1), doi: 10.1103/PhysRevB.110.014427; FULL TEXT
  (MAGNETRON, VERSALAB)
• MATTERN, M.; PUDELL, J.; ARREGI URIBEETXEBARRIA, J.; ZLÁMAL, J.; KALOUSEK, R.; UHLÍŘ, V.; RÖSSLE, M.; BARGHEER, M., 2024: . ADVANCED FUNCTIONAL MATERIALS 34(32), doi: 10.1002/adfm.202313014; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, ICON-SPM, WOOLLAM-VIS)
• MATTERN, M.; JARECKI, J.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; RÖSSLE, M.; BARGHEER, M., 2024: . APL MATERIALS 12(5), doi: 10.1063/5.0206095; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9)
• Opršal, J., 2024: . MASTER'S THESIS , p. 1 - 48; FULL TEXT
  (MAGNETRON, RIGAKU9, KERR-MICROSCOPE, ULTRAFAST-LASER)
• Hrdinová, S., 2024: . BACHELOR'S THESIS , p. 1 - 49; FULL TEXT
  (MAGNETRON, VERSALAB, ICON-SPM)
• Otýpka, M., 2024: . BACHELOR'S THESIS , p. 1 - 56; FULL TEXT
  (MAGNETRON, VERSALAB, DWL, WIRE-BONDER, KERR-MICROSCOPE)
• JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: . JOURNAL OF NEURAL ENGINEERING 21(4), doi: 10.1088/1741-2552/ad593d; FULL TEXT
  (PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)
• BENDOVÁ, M.; PRÁŠEK, J.; MOZALEV, A., 2024: . NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS , p. 1 - 6, doi: 10.37904/nanocon.2023.4751; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• Foltýn, M., 2024: . MASTER'S THESIS , p. 1 - 83; FULL TEXT
  (HELIOS, MAGNETRON, TITAN, RIGAKU3, LITESCOPE-MIRA-STAN)
• WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: . APPLIED PHYSICS LETTERS 125(13), p. 1 - 6, doi: 10.1063/5.0218478; FULL TEXT
  (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)
• OPANČAR, A.; GLOWACKI, E.; DEREK, V., 2024: . J NEURAL ENG , p. 1 - 17, doi: 10.1088/1741-2552/ad6a8b; FULL TEXT
  (DIENER, KAUFMAN, MAGNETRON)
• MOTYČKOVÁ, L.; ARREGI URIBEETXEBARRIA, J.; STAŇO, M.; PRŮŠA, S.; ČÁSTKOVÁ, K.; UHLÍŘ, V., 2023: . ACS APPLIED MATERIALS & INTERFACES 15(6), p. 8653 - 13, doi: 10.1021/acsami.2c20107; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, UHV-LEIS, VERIOS, ICON-SPM)
• KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: . SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
  (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, MPS150, KRATOS-XPS)
• WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: . COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD-FIJI, LYRA, ICON-SPM, BRILLOUIN)
• MISIUREV, D.; KASPAR, P.; SOBOLA, D.; PAPEZ, N.; FAWAEER, S.H.; HOLCMAN, V., 2023: . MATERIALS 16(8), p. 1 - 18, doi: 10.3390/ma16083203; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: . APPLIED PHYSICS LETTERS 122(20), p. 1 - 6, doi: 10.1063/5.0151338; FULL TEXT
  (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)
• ARREGI URIBEETXEBARRIA, J.; RINGE, F.; HAJDUČEK, J.; GOMONAY, O.; MOLNÁR, T.; JASKOWIEC, J.; UHLÍŘ, V., 2023: . JOURNAL OF PHYSICS: MATERIALS 6(3), p. 1 - 15, doi: 10.1088/2515-7639/acce6f; FULL TEXT
  (MAGNETRON, KERR-MICROSCOPE, VERSALAB, RIGAKU9, ICON-SPM, HELIOS, TITAN)
• Hnilica, J., 2023: . MASTER'S THESIS ; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, SUSS-RCD8, DWL, WIRE-BONDER, KERR-MICROSCOPE)
• Molnár, T., 2023: . MASTER'S THESIS , p. 1 - 73; FULL TEXT
  (MAGNETRON, RIGAKU9, KERR-MICROSCOPE, TITAN)
• POLAT, Ö.; HORÁK, M.; ARREGI URIBEETXEBARRIA, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2023: . SURFACES AND INTERFACES 40, doi: 10.1016/j.surfin.2023.103118; FULL TEXT
  (MAGNETRON, RIGAKU9, TITAN, HELIOS, CRYOGENIC, LYRA, KRATOS-XPS)
• HORÁK, M.; KONEČNÁ, A.; ŠIKOLA, T.; KŘÁPEK, V., 2023: . NANOPHOTONICS 12(15), p. 3089 - 10, doi: 10.1515/nanoph-2023-0153; FULL TEXT
  (MAGNETRON, HELIOS, TITAN)
• KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: . CERAMICS INTERNATIONAL 49(22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134; FULL TEXT
  (MAGNETRON, VERIOS, WITEC-RAMAN, MPS150, KEITHLEY-4200, KRATOS-XPS)
• POLAT, Ö.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: . JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS 161, p. 1 - 6, doi: 10.1016/j.jpcs.2021.110447; FULL TEXT
  (MAGNETRON, RIGAKU9, TITAN, HELIOS, CRYOGENIC, LYRA, KRATOS-XPS)
• MENDOSA-SANDOVAL, E.; RODRIGUEZ-LOPEZ, G.; ORDONEZ-ROMERO, C.; LAY, D.; QURESHI, N.; URBÁNEK, M.; SOLIS-IBARRA, D.; NOGUEZ, C.; LARA-GARCIA, H.; PIRRUCCIO, G., 2022: . JOURNAL OF MATERIALS CHEMISTRY C , p. 3704 - 9, doi: 10.1039/d1tc05331k; FULL TEXT
  (RAITH, MAGNETRON, RIE-CHLORINE, LYRA)
• MANAKHOV, A.; PERMYAKOVA, E.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; SOLOMATINA, M.; BAIDYSHEV, V.; POPOV, Z.; JANŮ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; KOVALSKII, A.; SHEVEYKO, A.; KIRYUKHANTSEV-KORNEEV, P.; SHTANSKY, D.; NEČAS, D.; SOLOVIEVA, A., 2022: . MOLECULES 27(4), doi: 10.3390/molecules27041333; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• POLAT, Ö.; MOHELSKÝ, I.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: . MATERIALS RESEARCH BULLETIN 149, p. 111696-1 - 7, doi: 10.1016/j.materresbull.2021.111696; FULL TEXT
  (MAGNETRON, RIGAKU9, TITAN, HELIOS, CRYOGENIC, LYRA, KRATOS-XPS)
• Velič, A., 2022: . BACHELOR'S THESIS , p. 1 - 42; FULL TEXT
  (MAGNETRON, VERSALAB, KERR-MICROSCOPE, ULTRAFAST-LASER)
• EHLICH, J.; MIGLIACCIO, L.; SAHALIANOV, I.; NIKIĆ, M.; BRODSKÝ, J.; GABLECH, I.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2022: . JOURNAL OF NEURAL ENGINEERING 19(3), p. 36045 - 15, doi: 10.1088/1741-2552/ac77c0; FULL TEXT
  (KAUFMAN, MAGNETRON)
• KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: . MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664; FULL TEXT
  (ALD-FIJI, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
• Holobrádek, J., 2022: . TREATISE TO STATE DOCTORAL EXAM , p. 1 - 26
  (VERIOS, HELIOS, KERR-MICROSCOPE, MAGNETRON, KAUFMAN)
• Kamnev, K., 2022: . PH.D. THESIS , p. 1 - 145; FULL TEXT
  (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)
• Vaňatka, M., 2021: . PH.D. THESIS , p. 1 - 113; FULL TEXT
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: . ACS APPLIED NANO MATERIALS 4(2), p. 1754 - 12, doi: 10.1021/acsanm.0c03202; FULL TEXT
  (MAGNETRON, RIE-FLUORINE, VERIOS, JAZ3-CHANNEL)
• Hajduček, J., 2021: . MASTER'S THESIS , p. 1 - 78; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
• Zadorozhnii, O., 2021: . MASTER'S THESIS , p. 1 - 81; FULL TEXT
  (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, UHV-DEPOSITION, UHV-PREPARATION, UHV-XPS, LYRA)
• Hnilica, J., 2021: . BACHELOR'S THESIS , p. 1 - 57; FULL TEXT
  (MAGNETRON, VERSALAB, VNA-MPI)
• Molnár, T., 2021: . BACHELOR'S THESIS , p. 1 - 52; FULL TEXT
  (MAGNETRON, KERR-MICROSCOPE)
• FOHLEROVÁ, Z.; KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: . ADVANCED MATERIALS INTERFACES 14(8), p. 1 - 14, doi: 10.1002/admi.202100256; FULL TEXT
  (MAGNETRON, VERIOS)
• SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; MOZALEV, A., 2021: . 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 44 - 6, doi: 10.37904/nanocon.2020.3693; FULL TEXT
  (MAGNETRON, VERIOS)
• KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: . 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 122 - 5, doi: 10.37904/nanocon.2020.3692; FULL TEXT
  (MAGNETRON, VERIOS, MPS150)
• PRESSACCO, F.; SANGALLI, D.; UHLÍŘ, V.; KUTNYAKHOV, D.; ARREGI URIBEETXEBARRIA, J.; AGUSTSSON, S.; BRENNER, G.; REDLIN, H.; HEBER, M.; VASILYEV, D.; DEMSAR, J.; SCHÖNHENSE, G.; GATTI, M.; MARINI, A.; WURTH, W.; SIROTTI, F., 2021: . NATURE COMMUNICATIONS 12(1), p. 5088-1 - 8, doi: 10.1038/s41467-021-25347-3; FULL TEXT
  (MAGNETRON, RIGAKU9, VERSALAB)
• Dhankhar, M.;, 2021: . PH.D. THESIS , p. 1 - 100; FULL TEXT
  (KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8, ICON-SPM)
• KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KOLÍBALOVÁ, E.; MICHALIČKA, J.; MOZALEV, A., 2021: . MATERIALS CHEMISTRY FRONTIERS 7(10), p. 1 - 13, doi: 10.1002/aelm.202100505; FULL TEXT
  (TITAN, MAGNETRON, HELIOS, VERIOS)
• VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: . PHYSICAL REVIEW APPLIED 16(5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033; FULL TEXT
  (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)
• Slavík, J., 2021: . PH.D. THESIS , p. 1 - 102; FULL TEXT
  (DWL, EVAPORATOR, PARYLENE-SCS, RIE-FLUORINE, MAGNETRON, LEICACOAT-NANO, LYRA, ICON-SPM)
• MOZALEV, A.; PYTLÍČEK, Z.; KAMNEV, K.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E., 2021: . MATERIALS CHEMISTRY FRONTIERS , p. 1917 - 15, doi: 10.1039/d0qm00862a; FULL TEXT
  (MAGNETRON, KRATOS-XPS)
• MANAKHOV, A.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; ADAMENKO, L.; PERMYAKOVA, E.; BAIDYSHEV, V.; POPOV, Z.; BLAHOVÁ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; SOLOVIEVA, A., 2021: . MEMBRANES 11(12), p. 1 - 19, doi: 10.3390/membranes11120965; FULL TEXT
  (MAGNETRON, MIRA-STAN, KRATOS-XPS)
• LEDNICKÝ, T.; BONYÁR, A., 2020: . ACS APPL MATER INTER 12(4), p. 4804 - 11, doi: 10.1021/acsami.9b20907; FULL TEXT
  (MAGNETRON, RIE-FLUORINE, VERIOS, HELIOS, LYRA, KRATOS-XPS)
• Horák, M., 2020: . PH.D. THESIS , p. 1 - 129; FULL TEXT
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
• UHLÍŘ, V.; PRESSACCO, F.; ARREGI URIBEETXEBARRIA, J.; PROCHÁZKA, P.; PRŮŠA, S.; POTOČEK, M.; ŠIKOLA, T.; ČECHAL, J.; BENDOUNAN, A.; SIROTTI, F., 2020: . APPLIED SURFACE SCIENCE 514, p. 145923-1 - 7, doi: 10.1016/j.apsusc.2020.145923; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, UHV-LEEM, UHV-LEIS, UHV-SPM, UHV-PREPARATION, UHV-XPS, SIMS)
• Chmela, O., 2020: . PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Mohelský, I., 2020: . MASTER'S THESIS , p. 1 - 49
  (FTIR, WOOLLAM-MIR, MAGNETRON, CRYOGENIC, KRATOS-XPS)
• Rovenská, K., 2020: . MASTER'S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI, KRATOS-XPS)
• ARREGI URIBEETXEBARRIA, J.; CAHA, O.; UHLÍŘ, V., 2020: . PHYSICAL REVIEW B 101(17), p. 174413-1 - 14, doi: 10.1103/PhysRevB.101.174413; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9)
• Motyčková, L., 2020: . MASTER'S THESIS , p. 1 - 90; FULL TEXT
  (MAGNETRON, VERSALAB, RIGAKU9, VERIOS, KERR-MICROSCOPE, ICON-SPM)
• KAMNEV, K.; PRÁŠEK, J.; MOZALEV, A., 2020: . NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS , p. 631 - 636, doi: 10.37904/nanocon.2019.8711; FULL TEXT
  (MAGNETRON)
• Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: . APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148
  (MAGNETRON, FTIR, LYRA, KRATOS-XPS)
• Hajduček, J., 2019: . BACHELOR'S THESIS , p. 1 - 46
  (MAGNETRON, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB, ICON-SPM)
• HORÁK, M.; KŘÁPEK, V.; HRTOŇ, M.; KONEČNÁ, A.; LIGMAJER, F.; STÖGER-POLLACH, M.; ŠAMOŘIL, T.; PATÁK, A.; ÉDES, Z.; METELKA, O.; BABOCKÝ, J.; ŠIKOLA, T., 2019: . SCIENTIFIC REPORTS 9, p. 1 - 11, doi: 10.1038/s41598-019-40500-1; FULL TEXT
  (FTIR, HELIOS, MAGNETRON, SNOM-NANONICS, TITAN, LYRA)
• Vojáček, L., 2019: . BACHELOR'S THESIS , p. 1 - 51; FULL TEXT
  (MAGNETRON, VERSALAB)
• Jaskowiec, J., 2019: . MASTER'S THESIS , p. 1 - 55
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, VERSALAB, ICON-SPM)
• Konečný, A., 2019: . BACHELOR'S THESIS , p. 1 - 32; FULL TEXT
  (MAGNETRON, PECVD, ALD-FIJI, WOOLLAM-MIR)
• ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: . JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
  (MIRA-EBL, MAGNETRON, LYRA)
• PRESSACCO, F.; UHLÍŘ, V.; GATTI, M.; NICOLAOU, A.; BENDOUNAN, A.; ARREGI URIBEETXEBARRIA, J.; PATEL, S.; FULLERTON, E.; KRIZMANCIC, D.; SIROTTI, F., 2018: . STRUCTURAL DYNAMICS 5(3), p. 034501-1 - 11, doi: 10.1063/1.5027809; FULL TEXT
  (MAGNETRON, RIGAKU9)
• CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: . NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
  (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
• NEUGEBAUER, P.; BLOOS, D.; MARX, R.; LUTZ, P.; KERN, M.; AGUILA, D.; VAVERKA, J.; LAGUTA, O.; DIETRICH, C.; CLÉRAC, R.; VAN SLAGEREN, J., 2018: . PHYSICAL CHEMISTRY CHEMICAL PHYSICS 20(22), p. 15528 - 7, doi: 10.1039/c7cp07443c; FULL TEXT
  (MAGNETRON)
• Motyčková, L., 2018: . BACHELOR'S THESIS , p. 1 - 55
  (MAGNETRON, CRYOGENIC, LYRA, ICON-SPM)
• Vančík, S., 2018: . MASTER'S THESIS , p. 1 - 68
  (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• BENDOVÁ, M.; KOLÁŘ, J.; GISPERT-GUIRADO, F.; MOZALEV, A., 2018: . CHEMELECTROCHEM 5(19), p. 2825 - 11, doi: 10.1002/celc.201800785; FULL TEXT
  (MAGNETRON, RIGAKU9, TITAN, KRATOS-XPS)
• Turčan, I., 2017: . MASTER'S THESIS , p. 1 - 55
  (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Jaskowiec, J., 2017: . BACHELOR'S THESIS , p. 1 - 47
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, LYRA, ICON-SPM)
• Vaňatka, M., 2017: . TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: . NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
  (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
• Fabianová, K., 2016: . BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
• MANAKHOV, A.; MICHLÍČEK, M.; NEČAS, D.; POLČÁK, J.; MAKHNEVA, E.; ELIÁŠ, M.; ZAJÍČKOVÁ, L., 2016: . SURFACE AND COATINGS TECHNOLOGY 295, p. 37 - 9, doi: 10.1016/j.surfcoat.2015.11.039; FULL TEXT
  (FTIR, MAGNETRON, LYRA, ICON-SPM)