Mechanical profilometer Bruker Dektak XT (DEKTAK)

Profile card (PDF)

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.

Publications:

• JANŮŠOVÁ, M.; NEČAS, D.; NAVASCUES, P.; HEGEMANN, D.; GAVRANOVIĆ, S.; ZAJÍČKOVÁ, L., 2025: Insight into plasma polymerization with a significant contribution of etching to the deposition process. SURFACE & COATINGS TECHNOLOGY 503, doi: 10.1016/j.surfcoat.2025.131962; FULL TEXT
  (DEKTAK, WOOLLAM-VIS, KRATOS-XPS)
• Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• Kipkurui Ronoh; Ivo Šulák; Dinara Sobola, 2025: Effect of ultrafast laser ablation on the wettability of superalloys. PROCEDIA STRUCTURAL INTEGRITY 74, p. 77 - 84, doi: 10.1016/j.prostr.2025.10.037; FULL TEXT
  (VERIOS, MIRA-STAN, DEKTAK, SEE-SYSTEM, KRATOS-XPS)
• Děcký, M., 2025: . MASTER'S THESIS , p. 1 - 63; FULL TEXT
  (MIRA-EBL, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, MPS150, LYRA, LASER-DICER)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: . MATERIALS RESEARCH EXPRESS 11(1), doi: 10.1088/2053-1591/ad184b; FULL TEXT
  (DEKTAK, MIRA-STAN, NANOINDENTER, KRATOS-XPS)

• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: . OPTICS AND LASER TECHNOLOGY 172, p. 1 - 19, doi: 10.1016/j.optlastec.2023.110514; FULL TEXT
  (TEGRAMIN, VERIOS, DEKTAK)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: . MATERIALS RESEARCH EXPRESS 14(8), p. 1 - 21, doi: 10.3390/app14083164; FULL TEXT
  (MIRA-STAN, WITEC-RAMAN, SEE-SYSTEM, DEKTAK)
• Mouralova, K.; Benes, L.; Fries, J., 2024: . THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 132(9-10), p. 4461 - 4471, doi: 10.1007/s00170-024-13631-7; FULL TEXT
  (TEGRAMIN, LYRA, DEKTAK)
• GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: . ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
  (EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: . APPLIED SURFACE SCIENCE , doi: 10.1016/j.apsusc.2024.161687; FULL TEXT
  (WITEC-RAMAN, VERIOS, MIRA-STAN, DEKTAK, KRATOS-XPS)
• Mouralova, K.; Fries, J.; Benes, L.; Houska, P., 2024: . PROCESSES 12(11), doi: 10.3390/pr12112448; FULL TEXT
  (DEKTAK, LYRA, TEGRAMIN)
• Koňařík, L., 2024: . BACHELOR'S THESIS , p. 1 - 46; FULL TEXT
  (LASER-DICER, DWL, EVAPORATOR, RIE-FLUORINE, DRIE, NANOCALC, DEKTAK, WIRE-BONDER, LYRA)
• Mouralova, K.; Bednar, J.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J., 2023: . MATERIALS 16(1), doi: 10.3390/ma16010100; FULL TEXT
  (TEGRAMIN, DEKTAK, LYRA)
• Benes, L.; Mouralova, K.; Midula, P.; Snow, J.; Lysonkova, I.; Pilnaj, D.; Burdova, H.; Prokes, T.; Zahradnicek, R.; Fries, J.; Kuráň, P.; Kubenka, M., 2023: . METALS 13(1), doi: 10.3390/met13010144; FULL TEXT
  (DEKTAK, TEGRAMIN, LYRA)
• Mouralova, K.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J.; Plichta, T., 2023: . INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 125(5-6), p. 2705 - 2715, doi: 10.1007/s00170-023-10913-4; FULL TEXT
  (DEKTAK, LYRA)
• GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: . PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
  (ALD-FIJI, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
• POUCHLÝ, V.; TALIMIAN, A.; KAŠTYL, J.; CHVÍLA, M.; ŠČASNOVIČ, E.; BELTRAN, A.; LOZANO, J.; GALUSEK, D., 2023: . JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 43(8), p. 3544 - 9, doi: 10.1016/j.jeurceramsoc.2023.01.059; FULL TEXT
  (DEKTAK)
• Mouralova, K.; Bednar, J.; Benes, L.; Polzer, A.; Zahradnicek, R.; Fries, J.; Prokes, T., 2023: . JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING 45(7), doi: 10.1007/s40430-023-04293-9; FULL TEXT
  (DEKTAK, LYRA, TITAN, HELIOS, TEGRAMIN)
• BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: . ACS APPL MATER INTER 15(22), p. 27002 - 8, doi: 10.1021/acsami.3c02049; FULL TEXT
  (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
• Mahel, V., 2023: . MASTER'S THESIS ; FULL TEXT
  (DWL, DRIE, DEKTAK, DIENER, WIRE-BONDER)
• Polzer, A.; Mouralova, K.; Benes, L.; Zahradnicek, R.; Fries, J., 2022: . PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054221075876; FULL TEXT
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• KAŠTYL, J.; ŠŤASTNÝ, P.; CHLUP, Z.; SONG, L.; ŠČASNOVIČ, E.; TRUNEC, M., 2022: . JOURNAL OF THE AMERICAN CERAMIC SOCIETY 105(6), p. 3909 - 16, doi: 10.1111/jace.18417; FULL TEXT
  (VERIOS, TITAN, HELIOS, RIGAKU3, DEKTAK, WITEC-RAMAN)
• Mouralova, K.; Benes, L.; Prokes, T.; Bednar, J.; Zahradnicek, R.; Fries, J., 2022: . PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054221136516; FULL TEXT
  (TEGRAMIN, DEKTAK, LYRA)
• Rybakiewicz-Sekita, R.; Gryszel, M.; Pathak, G.; Ganczarczyk, R.; Donahue, MJ.; Glowacki, ED., 2022: . JOURNAL OF MATERIALS CHEMISTRY C 10(15), p. 17208 - 8, doi: 10.1039/d2tc01448c; FULL TEXT
  (DEKTAK)
• Jarušek, J., 2022: . BACHELOR'S THESIS , p. 1 - 75; FULL TEXT
  (DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200)
• Mouralova, K.; Polzer, A.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2021: . PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART E: JOURNAL OF PROCESS MECHANICAL ENGINEERING , doi: 10.1177/09544089211031746; FULL TEXT
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• Kepič, P., 2021: . MASTER'S THESIS , p. 1 - 76; FULL TEXT
  (MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, SNOM-NANONICS, LYRA, ICON-SPM, KRATOS-XPS)
• Mouralova, K.; Polzer, A.; Benes, L.; Bednar, J.; Zahradnicek, R.; Kalivoda, M.; Fries, J., 2021: . PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054211043484; FULL TEXT
  (DEKTAK, TEGRAMIN, HELIOS, TITAN, LYRA)
• REDONDO NEGRETE, E.; PUMERA, M., 2021: . APPLIED MATERIALS TODAY 25, p. 101253-1 - 6, doi: 10.1016/j.apmt.2021.101253; FULL TEXT
  (DEKTAK, VERIOS, WITEC-RAMAN, KRATOS-XPS)
• KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M., 2020: . ADVANCES IN APPLIED CERAMICS 119(5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402; FULL TEXT
  (DEKTAK, VERIOS)
• ŠŤASTNÝ, P.; CHLUP, Z.; TRUNEC, M., 2020: . JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40(7), p. 2542 - 6, doi: 10.1016/j.jeurceramsoc.2019.10.042; FULL TEXT
  (VERIOS, DEKTAK)
• Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: . COATINGS, MDPI 10(6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590
  (TEGRAMIN, TITAN, DEKTAK, HELIOS, LYRA)
• Chmela, O., 2020: . PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Rovenská, K., 2020: . MASTER'S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI, KRATOS-XPS)
• Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Zadera, A.; Fries, J.; Kana, V., 2020: . MATERIALS 13(21), p. 4823-1 - 4823-20, doi: 10.3390/ma13214823
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• Mouralova, K.; Bednar, J.; Benes, L.; Hrabec, P.; Kalivoda, M.; Fries, J., 2020: . ARCHIVES OF CIVIL AND MECHANICAL ENGINEERING 20(4), p. 130-1 - 130-14, doi: 10.1007/s43452-020-00137-8
  (DEKTAK, LYRA)
• Habovštiaková, M., 2020: . MASTER'S THESIS , p. 1 - 83
  (DEKTAK, LYRA)
• Kudrna, T., 2020: . MASTER'S THESIS , p. 1 - 88
  (DEKTAK, LYRA)
• Zubáková, A., 2020: . MASTER'S THESIS , p. 1 - 62
  (DEKTAK, LYRA)
• Líkař, M., 2020: . MASTER'S THESIS , p. 1 - 62
  (DEKTAK, LYRA)
• Macháčová, V., 2020: . MATER'S THESIS , p. 1 - 64
  (DEKTAK, TEGRAMIN, LYRA)
• KEJÍK, L.; HORÁK, M.; ŠIKOLA, T.; KŘÁPEK, V., 2020: . OPTICS EXPRESS 28(23), p. 34960 - 13, doi: 10.1364/OE.409428; FULL TEXT
  (HELIOS, TITAN, LEICACOAT-STAN, DEKTAK, ICON-SPM)
• Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: . JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
  (DEKTAK, SIMS)
• Richter, V., 2019: . MASTER'S THESIS , p. 1 - 52
  (DEKTAK, KRATOS-XPS)
• ŠIK, O.; ŠKVARENINA, Ľ.; CAHA, O.; MORAVEC, P.; ŠKARVADA, P.; BELAS, E.; GRMELA, L., 2018: . JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 29(11), p. 9652 - 10, doi: 10.1007/s10854-018-9002-7; FULL TEXT
  (RIGAKU9, HELIOS, DEKTAK)
• Vančík, S., 2018: . MASTER'S THESIS , p. 1 - 68
  (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• MANAKHOV, A.; LANDOVÁ, M.; MEDALOVÁ, J.; MICHLÍČEK, M.; POLČÁK, J.; NEČAS, D.; ZAJÍČKOVÁ, L., 2017: . PLASMA PROCESSES AND POLYMERS 14(7), p. e1600123-1 - 12, doi: 10.1002/ppap.201600123; FULL TEXT
  (DEKTAK, LYRA, ICON-SPM, R2-PECVD)
• Knotek, M., 2015: . MASTER'S THESIS , p. 1 - 68
  (DEKTAK, LYRA, ICON-SPM)
• Manakhov, A; Zajickova, L; Elias, M; Cechal, J; Polcak, J; Hnilica, J; Bittnerova, S; Necas, D, 2014: . PLASMA PROCESSES AND POLYMERS 11(6), p. 532 - 544, doi: 10.1002/ppap.201300177
  (FTIR, DEKTAK, LYRA)