4-probe station Cascade Microtech MPS 150 (MPS150)

Technologies for ensuring the dies to be properly interconnected and packaged with high precision, accuracy and reliability to eliminate damage of dies and enable easy manipulation. Supporting inspection technologies should provide the possibility of optical surface monitoring and inspection of interconnection and soldering process. Electrical characterization probe station is also planned, as well as temperature dependencies and working stress testing of fabricated dies.

Publications:

• Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• KASPAR, P.; ŠIŠKA VIRÁGOVÁ, E.; DALLAEV, R.; PAPEŽ, N.; MACKŮ, R.; GRMELA, L.; ŠIK, O.; SEDLÁK, P.; SOBOLA, D., 2025: Structural analysis of imperfections in contacts of graphene chemiresistors. APPLIED SURFACE SCIENCE 704, doi: 10.1016/j.apsusc.2025.163501; FULL TEXT
  (HELIOS, TITAN, WITEC-RAMAN, SIMS, KEITHLEY-4200, MPS150)
• ZHANG, T.; HOLZER, J.; VYSTAVĚL, T.; KOLÍBAL, M.; PAIVA DE ARAÚJO, E.; STEPHENS, C.; BEN BRITTON, T., 2025: Characterization of WSe2 Films Using Reflection Kikuchi Diffraction in the Scanning Electron Microscope and Multivariate Statistical Analyses. ACS NANO 19(44), p. 38360 - 38370, doi: 10.1021/acsnano.5c10753; FULL TEXT
  (MPS150, NANOSCAN, WITEC-RAMAN)
• Děcký, M., 2025: . MASTER'S THESIS , p. 1 - 63; FULL TEXT
  (MIRA-EBL, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, MPS150, LYRA, LASER-DICER)
• GHOSH, K.; NG, S.; LAZAR, P.; KANDAMBATH PADINJAREVEETIL, A.; MICHALIČKA, J.; PUMERA, M., 2024: . ADVANCED FUNCTIONAL MATERIALS , doi: 10.1002/adfm.202308793; FULL TEXT
  (RIGAKU3, WITEC-RAMAN, TITAN, VERIOS, KEITHLEY-4200, MPS150, BET-DEGASSER, KRATOS-XPS, BET-ANAMET)

• KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: . ACS APPLIED ELECTRONIC MATERIALS 6(12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450; FULL TEXT
  (ALD-FIJI, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, LITESCOPE-LYRA, WITEC-RAMAN, WIRE-BONDER, NANOSCAN)
• KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: . SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
  (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, MPS150, KRATOS-XPS)
• GHOSH, K.; IFFELSBERGER, C.; KONEČNÝ, M.; VYSKOČIL, J.; MICHALIČKA, J.; PUMERA, M., 2023: . ADVANCED ENERGY MATERIALS 13(11), doi: 10.1002/aenm.202203476; FULL TEXT
  (VERIOS, MIRA-STAN, TITAN, RIGAKU3, MPS150, KEITHLEY-4200, ICON-SPM)
• KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: . CERAMICS INTERNATIONAL 49(22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134; FULL TEXT
  (MAGNETRON, VERIOS, WITEC-RAMAN, MPS150, KEITHLEY-4200, KRATOS-XPS)
• GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J., 2022: . JOURNAL OF MATERIALS SCIENCE 57(3), p. 1923 - 13, doi: 10.1007/s10853-021-06846-6; FULL TEXT
  (RIE-FLUORINE, DRIE, EVAPORATOR, WIRE-BONDER, WITEC-RAMAN, MPS150, KEITHLEY-4200, SUSS-MA8, DWL)
• NG, S.; GHOSH, K.; VYSKOČIL, J.; PUMERA, M., 2022: . CHEMICAL ENGINEERING JOURNAL 435(P3), p. 135131-1 - 14, doi: 10.1016/j.cej.2022.135131; FULL TEXT
  (MPS150, KEITHLEY-4200, VERIOS, WITEC-RAMAN, RIGAKU3, KRATOS-XPS)
• GHOSH, K.; NG, S.; IFFELSBERGER, C.; PUMERA, M., 2022: . APPLIED MATERIALS TODAY 26, p. 101301-1 - 10, doi: 10.1016/j.apmt.2021.101301; FULL TEXT
  (VERIOS, RIGAKU3, MPS150, KEITHLEY-4200, KRATOS-XPS)
• Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: . CHEMISTRY OF MATERIALS 34(4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106; FULL TEXT
  (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD-FIJI)
• KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: . MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664; FULL TEXT
  (ALD-FIJI, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
• Vodička, M., 2022: . BACHELOR'S THESIS , p. 1 - 60; FULL TEXT
  (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
• Děcký, M., 2022: . BACHELOR'S THESIS , p. 1 - 44; FULL TEXT
  (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
• Kamnev, K., 2022: . PH.D. THESIS , p. 1 - 145; FULL TEXT
  (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)
• Brodský J., 2021: . MASTER'S THESIS , p. 1 - 84; FULL TEXT
  (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, RIE-FLUORINE, DRIE, LYRA, ICON-SPM)
• KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: . 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 122 - 5, doi: 10.37904/nanocon.2020.3692; FULL TEXT
  (MAGNETRON, VERIOS, MPS150)
• Pejchal, T., 2021: . PH.D. THESIS ; FULL TEXT
  (NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, HELIOS, TITAN, ALD-FIJI, EVAPORATOR, MIRA-EBL, MPS150, KRATOS-XPS)
• Chmela, O., 2020: . PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Tesař, J., 2020: . MASTER'S THESIS , p. 1 - 67
  (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, WIRE-BONDER, ICON-SPM)
• Brodský, J., 2019: . BACHELOR'S THESIS , p. 1 - 50
  (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
• Citterberg, D., 2019: . MASTER'S THESIS , p. 1 - 50
  (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• Vančík, S., 2018: . MASTER'S THESIS , p. 1 - 68
  (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• HRDÝ, R.; KYNCLOVÁ, H.; KLEPÁČOVÁ, I.; BARTOŠÍK, M.; NEUŽIL, P., 2017: . ANALYTICAL CHEMISTRY 89(17), p. 8731 - 7, doi: 10.1021/acs.analchem.7b00776; FULL TEXT
  (MPS150, WIRE-BONDER)
• CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: . JOURNAL OF ELECTRICAL ENGINEERING 68(2), p. 158 - 5, doi: 10.1515/jee-2017-0023; FULL TEXT
  (DWL, KAUFMAN, MPS150, RIGAKU3)