Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices

Ph.D. Thesis

Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS , p. 1 - 145; FULL TEXT
(VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)

Equipment:

• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Magnetron sputtering system BESTEC (MAGNETRON)
• 4-probe station Cascade Microtech MPS 150 (MPS150)
• Keithley 4200-SCS Parameter Analyzer (KEITHLEY-4200)

Research Groups:

• CF: CEITEC Nano