Large Plasma Enhanced CVD (R2-PECVD)

The deposition chamber allows plasma processing of large substrates in capacitively coupled plasma (CCP). It is primarily used to deposit amine plasma polymers, i.e., organic thin films containing nitrogen functional groups, by plasma enhanced chemical vapor deposition (PECVD). These films are hydrophilic and have a positive surface charge. They can act as bioactive surface modifications helping the cells to attach to the coated surface, improving the cell adhesion or binding the biomolecules. Any material can be coated, even temperature-sensitive substrates like polycaprolactone nanofibrous mats. The plasma reactor can also be used for plasma treatment of materials in Ar or O2 plasma. This treatment will improve the adhesion of subsequently prepared thin films and change the surface-free energy or roughness. Additionally, oxygen plasma can be applied to etch organic materials, e.g., for surface cleaning. The processes are tunable and flexible because the pressure and RF power will vary the extent of ion bombardment and monomer dissociation. Various PECVD processes can be set up and developed upon a reasonable request. The process receipts are supported by the expertise of Assoc. Prof. Lenka Zajíčková, see https://plasma-technologies.cz/

Publications:

• BUCHTELOVÁ, M.; JANŮ, L.; NEČAS, D.; KŘÍŽKOVÁ, P.; BARTOŠÍKOVÁ, J.; MEDALOVÁ, J.; KOLSKÁ, Z.; HEGEMANN, D.; ZAJÍČKOVÁ, L., 2023: Insight into peculiar adhesion of cells to plasma-chemically prepared multifunctional ´amino-glue´ surfaces. PLASMA PROCESSES AND POLYMERS 20(6), p. 1 - 15, doi: 10.1002/ppap.202200157; FULL TEXT
  (KRATOS-XPS, ICON-SPM, R2-PECVD, R4-EXPERIMENTAL-PECVD)
• KOVAČ, J.; EKAR, J.; ČEKADA, M.; ZAJÍČKOVÁ, L.; NEČAS, D.; BLAHOVÁ, L.; WANG, J.; MOZETIČ, M., 2022: Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma. APPLIED SURFACE SCIENCE 581, p. 1 - 10, doi: 10.1016/j.apsusc.2021.152292; FULL TEXT
  (R2-PECVD)
• ČERNOCHOVÁ, P.; BLAHOVÁ, L.; MEDALOVÁ, J.; NEČAS, D.; MICHLÍČEK, M.; KAUSHIK, P.; PŘIBYL, J.; BARTOŠÍKOVÁ, J.; MANAKHOV, A.; BAČÁKOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Cell type specific adhesion to surfaces functionalised by amine plasma polymers. SCIENTIFIC REPORTS 10(1), p. 1 - 14, doi: 10.1038/s41598-020-65889-y; FULL TEXT
  (SEE-SYSTEM, ICON-SPM, R2-PECVD)
• KUPKA, V.; DVOŘÁKOVÁ, E.; MANAKHOV, A.; MICHLÍČEK, M.; PETRUŠ, J.; VOJTOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Well-Blended PCL/PEO Electrospun Nanofibers with Functional Properties Enhanced by Plasma Processing. POLYMERS 12(6), p. 1 - 16, doi: 10.3390/polym12061403; FULL TEXT
  (KRATOS-XPS, LYRA, R2-PECVD)
• MICHLÍČEK, M.; HAMAGUCHI, S.; ZAJÍČKOVÁ, L., 2020: Molecular dynamics simulation of amine groups formation during plasma processing of polystyrene surfaces. PLASMA SOURCES SCIENCE & TECHNOLOGY 29(10), p. 1 - 13, doi: 10.1088/1361-6595/abb2e8; FULL TEXT
  (R2-PECVD)

• NĚMČÁKOVÁ, I.; BLAHOVÁ, L.; RYŠÁNEK, P.; BLANQUER, A.; BAČÁKOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Behaviour of Vascular Smooth Muscle Cells on Amine Plasma-Coated Materials with Various Chemical Structures and Morphologies. INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES 21(24), p. 1 - 24, doi: 10.3390/ijms21249467; FULL TEXT
  (KRATOS-XPS, LEICACOAT-STAN, SEE-SYSTEM, LYRA, R2-PECVD)
• MANAKHOV, A.; LANDOVÁ, M.; MEDALOVÁ, J.; MICHLÍČEK, M.; POLČÁK, J.; NEČAS, D.; ZAJÍČKOVÁ, L., 2017: Cyclopropylamine plasma polymers for increased cell adhesion and growth. PLASMA PROCESSES AND POLYMERS 14(7), p. e1600123-1 - 12, doi: 10.1002/ppap.201600123; FULL TEXT
  (DEKTAK, LYRA, ICON-SPM, R2-PECVD)
• Manakhov, A;, Michlicek, M; Felten, A; Pireaux, J J; Necas, D; Zajickova, L., 2017: XPS depth profiling of derivatized amine and anhydride plasma polymers: Evidence of limitations of the derivatization approach. APPLIED SURFACE SCIENCE (394), p. 578 - 585, doi: 10.1016/j.apsusc.2016.10.099
  (ICON-SPM, R2-PECVD)
• Manakhov, A; Kedronova, E; Medalova, J; Cernochova, P; Obrusnik, A; Michlicek, M; Shtansky, DV; Zajickova, L, 2017: Carboxyl-anhydride and amine plasma coating of PCL nanofibers to improve their bioactivity. MATERIALS & DESIGN 132, p. 257 - 265, doi: 10.1016/j.matdes.2017.06.057
  (LEICACOAT-NANO, KRATOS-XPS, LYRA, R2-PECVD)
• Makhneva, E; Manakhov, A; Skladal, P; Zajickova, L, 2016: Development of effective QCM biosensors by cyclopropylamine plasma polymerization and antibody immobilization using cross-linking reactions. SURFACE & COATINGS TECHNOLOGY 290, p. 116 - 123, doi: 10.1016/j.surfcoat.2015.09.035
  (R2-PECVD)
• ŠTRBKOVÁ, L.; MANAKHOV, A.; ZAJÍČKOVÁ, L.; STOICA, A.; VESELÝ, P.; CHMELÍK, R., 2016: The adhesion of normal human dermal fibroblasts to the cyclopropylamine plasma polymers studied by holographic microscopy. SURFACE AND COATINGS TECHNOLOGY 295, p. 70 - 8, doi: 10.1016/j.surfcoat.2015.10.076; FULL TEXT
  (R2-PECVD)
• Manakhov, A; Necas, D; Cechal, J; Pavlinak, D; Elias, M; Zajickova, L, 2015: Deposition of stable amine coating onto polycaprolactone nanofibers by low pressure cyclopropylamine plasma polymerization. THIN SOLID FILMS 581, p. 7 - 13, doi: 10.1016/j.tsf.2014.09.015
  (R2-PECVD)
• Muresan, MG; Campbell, AC; Ondracka, P; Bursikova, V; Perina, V; Polcar, T; Reuter, S; Hammer, MU; Valtr, M; Zajickova, L, 2015: Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel. SURFACE & COATINGS TECHNOLOGY 272, p. 229 - 238, doi: 10.1016/j.surfcoat.2015.04.002
  (R2-PECVD)