PLD deposition system: UHV, in-situ RHEED, IR laser heating


Guarantor:
Michal Urbánek, Ph.D.

Instrument status:


Two selected progressive deposition technologies, equipped with state-of-the-art in-situ characterization and control:PLD oriented mainly towards oxide nanostructures (e.g., cuprate/manganite superlattices) and PECVD oriented mainly towards carbon nanostructures.


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