
Experimental PECVD: ion and mass analyzer, optical emission spectroscopy (R4-EXPERIMENTAL-PECVD)

Guarantor:
Marek Eliáš, Ph.D.
Instrument status:
Operational, 10.4.2025 10:51
Equipment placement:
CEITEC Nano - C1.41
experimental PECVD: ion and mass analyzer, optical emission spectroscopy
Publications:
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BUCHTELOVÁ, M.; JANŮ, L.; NEČAS, D.; KŘÍŽKOVÁ, P.; BARTOŠÍKOVÁ, J.; MEDALOVÁ, J.; KOLSKÁ, Z.; HEGEMANN, D.; ZAJÍČKOVÁ, L., 2023: Insight into peculiar adhesion of cells to plasma-chemically prepared multifunctional ´amino-glue´ surfaces. PLASMA PROCESSES AND POLYMERS 20(6), p. 1 - 15, doi: 10.1002/ppap.202200157; FULL TEXT
(KRATOS-XPS, ICON-SPM, R2-PECVD, R4-EXPERIMENTAL-PECVD) -
JANŮ, L.; DVOŘÁKOVÁ, E.; POLÁŠKOVÁ, K.; BUCHTELOVÁ, M.; RYŠÁNEK, P.; CHLUP, Z.; KRUML, T.; GALMIZ, O.; NEČAS, D.; ZAJÍČKOVÁ, L., 2023: Enhanced Adhesion of Electrospun Polycaprolactone Nanofibers to Plasma-Modified Polypropylene Fabric. POLYMERS 15(7), p. 1 - 17, doi: 10.3390/polym15071686; FULL TEXT
(LYRA, LEICACOAT-STAN, KRATOS-XPS, SEE-SYSTEM, R4-EXPERIMENTAL-PECVD) -
MICHLÍČEK, M.; BLAHOVÁ, L.; DVOŘÁKOVÁ, E.; NEČAS, D.; ZAJÍČKOVÁ, L., 2021: Deposition penetration depth and sticking probability in plasma polymerization of cyclopropylamine. APPLIED SURFACE SCIENCE 540, p. 1 - 10, doi: 10.1016/j.apsusc.2020.147979; FULL TEXT
(WOOLLAM-VIS, FTIR, KRATOS-XPS, LYRA, R4-EXPERIMENTAL-PECVD)
Photogallery
Specification
CCP 13.56 MHz | max. power 600 W |
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Sample size | up to 4" |
Gases: | Ar,O2, CO2,N2 |
Processes | deposition of polymer materials |
Documents
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