Experimental PECVD: ion and mass analyzer, optical emission spectroscopy (R4-EXPERIMENTAL-PECVD)

Instrument status:
Operational, 11.6.2020 11:19

Equipment placement:
CEITEC Nano - C1.41

experimental PECVD: ion and mass analyzer, optical emission spectroscopy

CCP 13.56 MHz	max. power 600 W
Sample size	up to 4"
Gases:	Ar,O₂, CO₂,N₂
Processes	deposition of polymer materials

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