Nucleation and growth of metal-catalyzed silicon nanowires under plasma

NANOTECHNOLOGY

Hyvl, M; Muller, M; Stuchlikova, TH; Stuchlik, J; Silhavik, M; Kocka, J; Fejfar, A; Cervenka, J, 2020: Nucleation and growth of metal-catalyzed silicon nanowires under plasma. NANOTECHNOLOGY 31(22), p. 225601-1 - 11, doi: 10.1088/1361-6528/ab76ef; FULL TEXT

Research Groups:

• LNSM
• CF: CEITEC Nano