Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis

Ph.D. Thesis

Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS ; FULL TEXT
(NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD, EVAPORATOR, MIRA-EBL, MPS150)

Equipment:

• nanoScanning Auger Microscopy/ Scanning electron microscopy with polarization analysis Scienta Omicron nanoSAM Lab (NANOSAM)
• Witec Alpha 300R (WITEC-RAMAN)
• Ultra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS (UHV-DEPOSITION)
• Ultra High Vacuum Preparation and Analytical System - Preparation Chamber SPECS (UHV-PREPARATION)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• 4-probe station Cascade Microtech MPS 150 (MPS150)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Tomáš Pejchal