DIENER Parylene coating system (PARYLENE-DIENER)

Parylene coating is used to coat surfaces with a thin, transparent parylene film. The coating is used in electronics, aviation and aerospace, sensor technology, medical/pharmaceutical, industrial, and automotive engineering applications.

This parylene coating system can be used for the deposition of parylene N, parylene C, parylene D, and parylene F-VT4. Depending on the parylene type, layer thicknesses of 0.05 to 20 micrometres can be achieved.

In parylene coating, dimers are vaporized in a vacuum. In the next stage, the dimers are thermally split into monomers on the hot walls of the pyrolysis tube. The monomers then polymerize primarily in the colder areas of the chamber and on the sample surfaces. This is a very gentle process, with virtually no increase in substrate surface temperature.

Publications:

• MIGLIACCIO, L.; SAY, M.; PATHAK, G.; GABLECH, I.; BRODSKÝ, J.; DONAHUE, M.; GLOWACKI, E., 2025: Ultrathin Indium Tin Oxide Accumulation Mode Electrolyte-Gated Transistors for Bioelectronics. ADVANCED MATERIALS TECHNOLOGIES , p. 2302219 - 9, doi: 10.1002/admt.202302219; FULL TEXT
  (SUSS-MA8, RIE-FLUORINE, PARYLENE-DIENER, KEITHLEY-4200)