Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma

APPLIED SURFACE SCIENCE

KOVAČ, J.; EKAR, J.; ČEKADA, M.; ZAJÍČKOVÁ, L.; NEČAS, D.; BLAHOVÁ, L.; WANG, J.; MOZETIČ, M., 2022: Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma. APPLIED SURFACE SCIENCE 581, p. 1 - 10, doi: 10.1016/j.apsusc.2021.152292; FULL TEXT

Research Groups:

• Plasma Technologies
• Development of Methods for Analysis and Measuring
• CF: CEITEC Nano
• Advanced Low-Dimensional Nanomaterials

CEITEC authors:

• Lenka Zajíčková, Ph.D.
• David Nečas, Ph.D.
• Lucie Janů, Ph.D.