Academic users

Who's eligible for academic prices?

  1. The self-service or full-service users must prove affiliation with an academic institution.
  2. The user agrees that the results will only be used for independent research purposes and will not be disclosed or sold to third parties.

Acknowledgement: In the case of publication of the results achieved in the CEITEC Nano Research Infrastructure, acknowledges its use in all the publications resulting from the work done here, as instructed at

Authorship policy: Please note, that the type of service has no influence on authorship policy and any form of paid service is not a waiver for ignoring authorship. All contributors who have made substantive intellectual contributions to a paper should be given an opportunity to be given credit as authors regardless of financial arrangement.

Should you wish to undertake a commercial project as part of your academic access, please contact us to obtain the exact terms on which this is possible at

​​1. Self-service users

The preferred way of using the equipment at CEITEC Nano Research Infrastructure for academic users is self-service open access. The instrument running cost is 100% covered by CEITEC Nano, only the administration and training fee is paid by the user.

Access to all CEITEC Nano equipment via the booking systemCZK (without VAT)EUR (without VAT)
The user fee for new and regular users30,000/year1,154/year

Self-service users gain full independent access to all CEITEC Nano labs and access to all instruments via the booking system. Authorization to work on individual instruments is required and can be obtained after proper training.

1. Register via Perun website –
(it takes about 15min to be able to log in with your new user account)

2. Print the CEITEC Nano User fee agreement & Solemn declaration and sign it. If you have a faculty advisor and/or sponsor have them sign it as well. Bring the agreement to the user office or scan and email it to

3. Thoroughly study the CEITEC Nano User Manual, then pass the exam (see Training->General training).

  • Wait to receive an email (this can take up to 5 working days) that shows your score and whether or not you passed the exam. Please note: You need to be registered via the Perun website to get the access link to the online test - see No. 1
  • If you did not pass the exam, you can Correct and resubmit the exam at the CEITEC Nano User Manual Exam page.

4. Contact the CEITEC Nano User Office to schedule a laboratory safety excursion. The CEITEC Nano User Office can be reached via email at or by phone 54114 9206.

a)   “Handling of toxic and dangerous chemical substances” training – mandatory for all users who will be in contact with dangerous chemical compounds/solutions (for example HF) – 60 min

b) Safety excursions – five options are available:

  • Full CEITEC Nano excursion – 2 hrs.
  • Nanofabrication laboratory – 45 min.
  • Nanocharacterization laboratory – 30 min.
  • Structural analysis laboratory – 30 min.
  • Chemical laboratory – 20min.

5. After you have completed all of the access requirements, you can start with the training for individual equipment.

6. During the period of your work in CEITEC Nano RI you are obliged to send us your publications (thesis, papers, articles…) and other scientific outcomes (posters, presentations…) by email to (PDF file) with Acknowledgement to CEITEC Nano RI. If you have not published any outcomes over the past year and you are going to prolong your access to the RI, please fill in the CEITEC Nano activity report and submit it with the new User fee agreement.

2. Services for academic users

For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of authorized personnel.

How to order full-service

  1. Contact the CEITEC Nano User Office at or via phone at 54114 9200 to discuss your processing requirements.
  2. The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. We provide support regarding internal invoicing from projects running at CEITEC and BUT. Contact CEITEC Nano financial manager Kateřina Tydlačková (+420 54114 9205) with your questions.
  3. If you agree with the quotation, send the purchase order to
  4. CEITEC Nano staff will process your samples and prepare a processing/measurement report.
  5. Upon agreement, an invoice will be emailed to you together with the samples or measurement data.

Prices for academic users

Valid from 1st April 2023.
Academic users using the full-service pay hourly rates (listed below - VAT is not included) for the instrument use and an additional fee for the analysis of the results (if requested).

CEITEC Nano pricelist* - full service for Academic users

Nanofabrication Laboratory


RAITHE-beam writer RAITH150 Two2 20095
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA31 60070
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs1 60070
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen31 60070
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec1 60070
SUSS-RCD8Resist coating and development system SÜSS MicroTec RCD81 60070
LAURELLSpincoater Laurell WS-650-23B1 20050
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 20001 20050
DEKTAKMechanical profilometer Bruker Dektak XT1 60070
DIENERResist stripper Diener electronic NANO Plasma cleaner1 60070
FUMEHOODFumehoods for organic solvents and Fumehoods for corrosive liquids1 20050

Depositions and etching

EVAPORATORElectron beam evaporator BESTEC1 600**70**
MAGNETRONMagnetron sputtering system BESTEC1 600**70**
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2001 60070
XEF2XeF2 etching system1 60070
PARYLENESCS Parylene Deposition System1 60070
PECVD-NANOFABHigh-temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab1 60070
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe1 60070
APCVDAtmospheric Pressure chemical vapor deposition1 60070
LPCVDLow-pressure chemical vapor deposition1 60070
MOCVDMetal-organic chemical vapor deposition1 60070
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 60070
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 60070
SCIAIon beam etching Scia Systems Coat 2001 60070
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1001 60070
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 801 60070


WIRE-BONDERWire bonder TPT HB 161 20050
LASER-DICERLaser dicer Oxford Lasers A-Series1 20050
DICING-SAWSemiautomatic dicing saw ESEC 80031 20050
CPD-AUTOSAMDRICritical Point Dryer – Tousimis Autosamdri-815B1 20050

Nanocharacterization laboratory

UHV Technologies

SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS52 20095
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra2 20095
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab2 20095
UHV-CLUSTERUltra-High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS2 20095

Microscopy and nanomanipulation

LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA31 60070
MIRA3-XMUScanning electron microscope (SEM) MIRA3 XMU1 60070
ICON-SPMScanning Probe Microscope Bruker Dimension Icon1 60070
LEXT-OLS4100Confocal Laser Scanning Microscope Olympus Lext OLS41001 60070
JPK-NANOWIZARDAtomic force microscope JPK Nanowizard1 60070
RAMANWitec Alpha 300R1 60070
NANOSCANNanoScan VLS-801 60070
KERR-MICROSCOPEMagneto-optical Kerr microscope1 20050
NANOINDENTORHysitron TI 9501 60070

Optical measurements

FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT1 60070
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE   1 20050
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE1 60070
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10001 60070
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 5121 20050
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel1 20050
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40001 60070
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II1 60070

Electrical and magnetic measurements

SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120001 60070
MPS1504-probe station Cascade Microtech MPS 1501 20050
KEITHLEYKeithley 4200-SCS Parameter Analyzer1 20050
VERSALABCryogenic-free VSM and ETO measurement system – Quantum Design, VersaLab1 20050
LAKESHORELow-Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF1 60070
CRYOGENICLow-Temperature Vibrating Sample Magnetometer Cryogenic Limited1 60070

Structural analysis laboratory

Electron microscopy

TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed2 800120
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6602 20095
VERIOSHigh-resolution Scanning Electron Microscope FEI Verios 460L2 20095

Sample preparation

STEMIStereomicroscope Zeiss Stemi 5081 20050
TENUPOLTEM electrolytic polisher Tenupol 51 20050
FISCHIONE-160TEM specimen grinding tool Fischione 1601 20050
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 1701 20050
CITOVACVacuum impregnation chamber Citovac1 20050
LEICACOAT-STANCoater Leica EM ACE6001 20050
TXPTarget surfacing system Leica TXP1 20050
TIC3XCross-section/broad beam ion polisher Leica EM TIC3X1 20050
FISCHIONE-200Dimple grinder Fichione 2001 20050
LECTROPOLElectrolytic polisher Lectropol 51 20050
TEGRAMINGrinder/polisher Tegramin 301 20050
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m1 20050
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 10501 20050
LABOTOM5Metallographic saw Labotom 51 20050
CITOPRESSMounting press Citopress 101 20050
PLASMACLEANERPlasma cleaner Fischione 10201 20050
SAW-ACCUTOMPrecision saw Accutom 1001 20050
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 6001 20050

X-ray diffractometry

RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW1 600
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW1 600

Micro & Nano X-ray CT laboratory

microCTmicroCT GE phoenix v|tome|x L2404 000165
nanoCTnanoCT Rigaku nano3DX3 500145

Laser Spectroscopy laboratory

LIBSLaser-Induced Breakdown Spectroscopy3 500145

Thermogravimetric analysis

TGA96TGA96Line1 60070

Consumables per analysis (gases, cups)60025

  * Prices without VAT
     Prices in EUR are approximately at the rate of 24 CZK = 1 EUR