Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)


Guarantor:
Vojtěch Švarc

Instrument status:
Operational Operational, 24.5.2018 13:52, Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer

Equipment placement:
CEITEC Nano - C1.30


Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.


Publications:

Photogallery

Specification


Spectral Range 250 – 1100 nm
Total thickness range 10 nm – 100 um
Resolution 0.1 nm
Repetability 0.3 nm
Absolute accuracy < 1 % (100 nm – 10 um)
Number of layers up to 10 layers
Distance with fiber 1 – 5 mm
Distance with optic 5 – 100 mm
Angle with optic 90° (nominal incidence)
Spot size 400 um (optional 100/200 um
Microspot                                        1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter
Fiber length 2 m (other lengths available on request)


Documents

Here is place for your documents.