Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)


Guarantor:
Vojtěch Švarc

Instrument status:
Operational Operational, 17.3.2023 11:56

Equipment placement:
CEITEC Nano - C1.30


Multilayers characterization of transparent materials, such as lithography resists, oxides or thin metals in reflection mode. The interval of measured film thickness is from 10 nm up to 100 um.


Publications:

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Photogallery

Specification


Spectral Range 250 – 1100 nm
Total thickness range 10 nm – 100 um
Resolution 0.1 nm
Repetability 0.3 nm
Absolute accuracy < 1 % (100 nm – 10 um)
Number of layers up to 10 layers
Distance with fiber 1 – 5 mm
Distance with optic 5 – 100 mm
Angle with optic 90° (nominal incidence)
Spot size 400 um (optional 100/200 um
Microspot                                        1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter
Fiber length 2 m (other lengths available on request)


Documents

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