Services for commercial users


How to order commercial full-service

Contact the CEITEC Nano User Office at nano@ceitec.vutbr.cz or via phone +420 54114 9200 to discuss your processing requirements.
The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. If you have any questions regarding invoicing contact CEITEC Nano financial manager Kateřina Tydlačková (+420 51118 1252, katerina.tydlackova@ceitec.vutbr.cz) with your questions.
If you agree with the quotation send the purchase order to nano@ceitec.vutbr.cz
CEITEC Nano staff will process your samples and prepare a processing/measurement report.
Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for commercial users

Valid from 1st July 2019
The prices include full instrument running costs, operator’s wage, instrument depreciation and CEITEC Nano processing fee. Contact CEITEC Nano User Office at nano@ceitec.vutbr.cz for a quotation.

CEITEC Nano pricelist* - full service for Commercial users






Nanofabrication laboratory




Lithography

CZK/hourEUR/hour
RAITHE-beam writer RAITH150 Two3 300127
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA32 51097
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs2 42093
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen33 370130
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec2 950113
SUSS-RCD8Resist coating and development system SÜSS MicroTec RCD82 760106
LAURELLSpincoater Laurell WS-650-23B2 950113
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 20002 27087
DEKTAKMechanical profilometer Bruker Dektak XT2 49096
DIENERResist stripper Diener electronic NANO Plasma cleaner2 30088





Depositions and etching

CZK/hourEUR/hour
EVAPORATORElectron beam evaporator BESTEC3 650**140**
MAGNETRONMagnetron sputtering system BESTEC3 240**125**
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2003 080118
XERIONRapid thermal annealing Xerion XREACT/1 250°C2 660102
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab3 390130
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe3 780145
APCVDAtmospheric Pressure chemical vapor deposition2 930113
LPCVDLow pressure chemical vapor deposition2 930113
MOCVDMetal organic chemical vapor deposition3 280126
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 780145
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 330128
SCIAIon beam etching Scia Systems Coat 2003 450133
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1002 780107
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 803 610139





Packaging

CZK/hourEUR/hour
WIRE-BONDERWire bonder TPT HB 162 23086
LASER-DICERLaser dicer Oxford Lasers A-Series2 600100
DICING-SAWSemiautomatic dicing saw ESEC 80032600100





Nanocharacterization laboratory




UHV Technologies

CZK/hourEUR/hour
SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS54 200162
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra4 200162
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab4 200162
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS2 900112





Microscopy and nanomanipulation

CZK/hourEUR/hour
LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA33 600138
ICON-SPMScanning Probe Microscope Bruker Dimension Icon3 120120
KERR-MICROSCOPEMagneto-optical Kerr microscope2 690103
NANOINDENTORHysitron TI 9503 300127





Optical measurements

CZK/hourEUR/hour
FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT3 650140
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE2 700104
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE2 830109
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10002 51097
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 5122 46095
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel2 46095
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40003 370130
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II3 190123





Electrical and magnetic measurements

CZK/hourEUR/hour
SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120003 120120
MPS1504-probe station Cascade Microtech MPS 1502 31089
KEITHLEYKeithley 4200-SCS Parameter Analyzer2 31089
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF3 080118
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited3 220124





Structural analysis laboratory




Electron microscopy

CZK/hourEUR/hour
TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed6 100235
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6604 200162
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L3 600138





Sample preparation

CZK/hourEUR/hour
STEMIStereomicroscope Zeiss Stemi 5081 90073
TENUPOLTEM electrolytical polisher Tenupol 52 26087
FISCHIONE-160TEM specimen grinding tool Fischione 1601 96075
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 1702 06079
CITOVACVacuum impregnation chamber Citovac1 97076
LEICACOAT-STANCoater Leica EM ACE6002 22085
TIC3XCross section/broad beam ion polisher Leica EM TIC3X2 670103
FISCHIONE-200Dimple grinder Fichione 2001 97076
LECTROPOLElectrolytical polisher Lectropol 52 18084
TEGRAMINGrinder/polisher Tegramin 302 21086
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m2 07080
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 10502 870110
LABOTOM5Metallographic saw Labotom 52 27087
CITOPRESSMounting press Citopress 101 93074
PLASMACLEANERPlasma cleaner Fischione 10202 36091
SAW-ACCUTOMPrecision saw Accutom 1002 32089
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 6002 32089





X-ray diffractometry

CZK/hourEUR/hour
RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW3 260125
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW2 900112





Micro & Nano X-ray CT laboratory

CZK/hourEUR/hour
microCTmicroCT GE phoenix v|tome|x L2404 050156
nanoCTnanoCT Rigaku nano3DX2 940113





Laser Spectroscopy laboratory

CZK/hourEUR/hour
LIBSLaser-Induced Breakdown Spectroscopy2 800108

 
* Prices without VAT
** Au/Pt – 20 CZK/nm (EVAPORATOR, MAGNETRON)
     Prices in EUR are approximate at the rate of 26 CZK = 1 EUR


Access for self-service commercial users

Commercial users typically order measurement/nanofabrication services and their samples are processed by CEITEC Nano staff. They can be present at the measurement as visitors under the supervision of authorized personnel.

If required, self-service access to all CEITEC Nano equipment is available also to commercial users. Commercial users pay a User fee (30,000 CZK/year) plus they pay an hourly charge which includes full instrument running costs, instrument depreciation and CEITEC Nano training and processing fees. See full CEITEC Nano price list.

Please contact us at nano@ceitec.vutbr.cz to discuss your individual needs and pricing.

Commercial users