Services for commercial users

    

How to order commercial full-service

Contact the CEITEC Nano User Office at nano@ceitec.vutbr.cz or via phone +420 54114 9200 to discuss your processing requirements.
The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. If you have any questions regarding invoicing contact CEITEC Nano financial manager Kateřina Tydlačková (+420 51118 1252, katerina.tydlackova@ceitec.vutbr.cz) with your questions.
If you agree with the quotation send the purchase order to nano@ceitec.vutbr.cz
CEITEC Nano staff will process your samples and prepare a processing/measurement report.
Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for commercial users

Valid from 1st May 2018
The prices include full instrument running costs, operator’s wage, instrument depreciation and CEITEC Nano processing fee. Contact CEITEC Nano User Office at nano@ceitec.vutbr.cz for a quotation.

CEITEC Nano pricelist* - full service for Commercial users







Nanofabrication laboratory




Lihography

CZK/hourEUR/hour
RAITHE-beam writer RAITH150 Two3 000115
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA32 21085
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs2 12081
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen33 070118
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec2 650102
SUSS-RC8Resist coating and development system SÜSS MicroTec RCD82 46095
LAURELLSpincoater Laurell WS-650-23B2 650102
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 20001 97076
DEKTAKMechanical profilometer Bruker Dektak XT2 19084
DIENERResist stripper Diener electronic NANO Plasma cleaner2 00077





Depositions and etching

CZK/hourEUR/hour
EVAPORATORElectron beam evaporator BESTEC3 350129
MAGNETRONMagnetron sputtering systém BESTEC2 940113
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2002 780107
XERIONRapid thermal annealing Xerion XREACT/1 250°C2 36091
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab3 090119
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe3 480134
APCVDAtmospheric Pressure chemical vapor deposition2 630101
LPCVDLow pressure chemical vapor deposition2 630101
MOCVDMetal organic chemical vapor deposition2 980115
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 480134
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 030116
SCIAIon beam etching Scia Systems Coat 2003 150121
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1002 48095
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 803 310127





Packaging

CZK/hourEUR/hour
WIRE-BONDERWire bonder TPT HB 161 93074
LASER-DICERLaser dicer Oxford Lasers A-Series2 30088





Nanocharacterization laboratory




UHV Technologies

CZK/hourEUR/hour
SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS53 900150
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra3 900150
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab3 900150
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS2 600100





Microscopy and nanomanipulation

CZK/hourEUR/hour
LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA33 300127
ICON-SPMScanning Probe Microscope Bruker Dimension Icon2 820108
KERR-MICROSCOPEMagneto-optical Kerr microscope2 39092
NANOINDENTORHysitron TI 9503 000115





Optical measurements

CZK/hourEUR/hour
FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT3 350129
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE2 40092
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE2 53097
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10002 21085
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 5122 16083
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel2 16083
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40003 070118
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II2 890111





Electrical and magnetic measurements

CZK/hourEUR/hour
SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120002 820108
MPS1504-probe station Cascade Microtech MPS 1502 01077
KEITHLEYKeithley 4200-SCS Parameter Analyzer2 01077
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF2 780107
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited2 920112





Structural analysis laboratory




Electron microscopy

CZK/hourEUR/hour
TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed5 800223
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6603 900150
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L3 300127





Sample preparation

CZK/hourEUR/hour
STEMIStereomicroscope Zeiss Stemi 5081 60062
TENUPOLTEM electrolytical polisher Tenupol 51 96075
FISCHIONE-160TEM specimen grinding tool Fischione 1601 66064
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 1701 76067
CITOVACVacuum impregnation chamber Citovac1 67064
LEICACOAT-STANCoater Leica EM ACE6001 92074
TIC3XCross section/broad beam ion polisher Leica EM TIC3X2 37091
FISCHIONE-200Dimple grinder Fichione 2001 67064
LECTROPOLElectrolytical polisher Lectropol 51 88072
TEGRAMINGrinder/polisher Tegramin 301 91073
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m1 77068
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 10502 57099
LABOTOM5Metallographic saw Labotom 51 97076
CITOPRESSMounting press Citopress 101 63063
PLASMACLEANERPlasma cleaner Fischione 10202 06079
SAW-ACCUTOMPrecision saw Accutom 1002 02078
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 6002 02078





X-ray diffractometry

CZK/hourEUR/hour
RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW2 960114
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW2 600100





Micro & Nano X-ray CT laboratory

CZK/hourEUR/hour
microCTmicroCT GE phoenix v|tome|x L2403 750144
nanoCTnanoCT Rigaku nano3DX2 640102





Laser Spectroscopy laboratory

CZK/hourEUR/hour
LIBSLaser-Induced Breakdown Spectroscopy2 50096

 
*Prices without VAT
  Prices in EUR are approximate at the rate of 26 CZK = 1 EUR


Access for self-service commercial users

Commercial users typically order measurement/nanofabrication services and their samples are processed by CEITEC Nano staff. They can be present at the measurement as visitors under the supervision of authorized personnel.

If required, self-service access to all CEITEC Nano equipment is available also to commercial users. Commercial users pay a User fee (30,000 CZK/year) plus they pay an hourly charge which includes full instrument running costs, instrument depreciation and CEITEC Nano training and processing fees. See full CEITEC Nano price list.

Please contact us at nano@ceitec.vutbr.cz to discuss your individual needs and pricing.

Commercial users

               






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