Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
Guarantor:
Vojtěch Švarc, Ph.D.
Instrument status:
Operational, 17.3.2023 11:56
Equipment placement:
CEITEC Nano - C1.30
Multilayers characterization of transparent materials, such as lithography resists, oxides or thin metals in reflection mode. The interval of measured film thickness is from 10 nm up to 100 um.
Publications:
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Idesová, B., 2023: Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths. MASTER´S THESIS , p. 1 - 71; FULL TEXT
(EVAPORATOR, ALD, RAITH, NANOCALC, SCIA) -
GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
(ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM) -
Jarušek, J., 2022: Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications. BACHELOR´S THESIS , p. 1 - 75; FULL TEXT
(DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200) -
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM) -
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
(PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
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Kvapil, M., 2015: Plasmonic Antennas. PH.D. THESIS , p. 1 - 104
(FTIR, NANOCALC, TERS, DIENER, LYRA) -
Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
(MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD, LYRA)
Photogallery
Specification
Spectral Range | 250 – 1100 nm |
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Total thickness range | 10 nm – 100 um |
Resolution | 0.1 nm |
Repetability | 0.3 nm |
Absolute accuracy | < 1 % (100 nm – 10 um) |
Number of layers | up to 10 layers |
Distance with fiber | 1 – 5 mm |
Distance with optic | 5 – 100 mm |
Angle with optic | 90° (nominal incidence) |
Spot size | 400 um (optional 100/200 um |
Microspot | 1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter |
Fiber length | 2 m (other lengths available on request) |
Documents
Here is place for your documents.