Magnetron sputtering system BESTEC (MAGNETRON)
Guarantor:
Jan Prášek, Ph.D.
Instrument status:
Operational, 15.11.2024 11:31, Installed targets: Ta(1), Pt(2), Tb(3), SiO2(4), Co(5), V(6), Ti(7), Fe(8) + oxygen
Equipment placement:
CEITEC Nano - C1.36
The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.
Publications:
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Hrdinová, S., 2024: Influence of the epitaxial strain at the lateral thin film-stripe interface on the Ferromagnetic-Antiferromagnetic phase coexistence in FeRh. BACHELOR´S THESIS , p. 1 - 49; FULL TEXT
(MAGNETRON, VERSALAB, ICON-SPM) -
Castellano, A.; Alhada-Lahbabi, K.; Arregi, JA.; Uhlir, V.; Perrin, B.; Gourdon, C.; Fournier, D.; Verstraete, MJ.; Thevenard, L., 2024: Magnetic phase dependency of the thermal conductivity of FeRh from thermoreflectance experiments and numerical simulations. PHYSICAL REVIEW MATERIALS 8(8), doi: 10.1103/PhysRevMaterials.8.084411; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, WOOLLAM-VIS) -
MATTERN, M.; JARECKI, J.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; RÖSSLE, M.; BARGHEER, M., 2024: Speed limits of the laser-induced phase transition in FeRh. APL MATERIALS 12(5), doi: 10.1063/5.0206095; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9) -
Otýpka, M., 2024: Electric-current Control of Magnetic Textures in Synthetic Antiferromagnets. BACHELOR´S THESIS , p. 1 - 56; FULL TEXT
(MAGNETRON, VERSALAB, DWL, WIRE-BONDER, KERR-MICROSCOPE) -
OURDANI, D.; CASTELLANO, A.; VYTHELINGUM, A.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; PERRIN, B.; BELMEGUENAI, M.; ROUSSIGNÉ, Y.; GOURDON, C.; VERSTRAETE, M.; THEVENARD, L., 2024: Experimental determination of the temperature- and phase-dependent elastic constants of FeRh. PHYSICAL REVIEW B 110(1), doi: 10.1103/PhysRevB.110.014427; FULL TEXT
(MAGNETRON, VERSALAB)
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Opršal, J., 2024: Fabrication and study of epitaxial NiO thin films and their antiferromagnetic domain structure. MASTER´S THESIS , p. 1 - 48; FULL TEXT
(MAGNETRON, RIGAKU9, KERR-MICROSCOPE, ULTRAFAST-LASER) -
MATTERN, M.; PUDELL, J.; ARREGI URIBEETXEBARRIA, J.; ZLÁMAL, J.; KALOUSEK, R.; UHLÍŘ, V.; RÖSSLE, M.; BARGHEER, M., 2024: Accelerating the Laser-Induced Phase Transition in Nanostructured FeRh via Plasmonic Absorption. ADVANCED FUNCTIONAL MATERIALS 34(32), doi: 10.1002/adfm.202313014; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, ICON-SPM, WOOLLAM-VIS) -
Molnár, T., 2023: Magneto-optical gradient effect imaging of magnetic textures. MASTER´S THESIS , p. 1 - 73; FULL TEXT
(MAGNETRON, RIGAKU9, KERR-MICROSCOPE, TITAN) -
KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
(MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150) -
Hnilica, J., 2023: Current-induced domain wall propagation in ferrimagnetic wires. MASTER´S THESIS ; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, SUSS-RCD8, DWL, WIRE-BONDER, KERR-MICROSCOPE) -
HORÁK, M.; KONEČNÁ, A.; ŠIKOLA, T.; KŘÁPEK, V., 2023: Spatio-spectral metrics in electron energy loss spectroscopy as a tool to resolve nearly degenerate plasmon modes in dimer plasmonic antennas. NANOPHOTONICS 12(15), p. 3089 - 10, doi: 10.1515/nanoph-2023-0153; FULL TEXT
(MAGNETRON, HELIOS, TITAN) -
WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
(RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN) -
WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: Phase-resolved optical characterization of nanoscale spin waves. APPLIED PHYSICS LETTERS 122(20), p. 1 - 6, doi: 10.1063/5.0151338; FULL TEXT
(RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR) -
ARREGI URIBEETXEBARRIA, J.; RINGE, F.; HAJDUČEK, J.; GOMONAY, O.; MOLNÁR, T.; JASKOWIEC, J.; UHLÍŘ, V., 2023: Magnetic-field-controlled growth of magnetoelastic phase domains in FeRh. JOURNAL OF PHYSICS: MATERIALS 6(3), p. 1 - 15, doi: 10.1088/2515-7639/acce6f; FULL TEXT
(MAGNETRON, KERR-MICROSCOPE, VERSALAB, RIGAKU9, ICON-SPM, HELIOS, TITAN) -
POLAT, Ö.; HORÁK, M.; ARREGI URIBEETXEBARRIA, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Synthesis and characterization of half-Heusler ScPtBi films via three-source magnetron co-sputtering on Nb superconductor buffer layer. SURFACES AND INTERFACES 40, doi: 10.1016/j.surfin.2023.103118; FULL TEXT
(MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, CRYOGENIC, LYRA) -
MOTYČKOVÁ, L.; ARREGI URIBEETXEBARRIA, J.; STAŇO, M.; PRŮŠA, S.; ČÁSTKOVÁ, K.; UHLÍŘ, V., 2023: Preserving Metamagnetism in Self-Assembled FeRh Nanomagnets. ACS APPLIED MATERIALS & INTERFACES 15(6), p. 8653 - 13, doi: 10.1021/acsami.2c20107; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, UHV-LEIS, VERIOS, ICON-SPM) -
MISIUREV, D.; KASPAR, P.; SOBOLA, D.; PAPEZ, N.; FAWAEER, S.H.; HOLCMAN, V., 2023: Exploring the Piezoelectric Properties of Bismuth Ferrite Thin Films Using Piezoelectric Force Microscopy: A Case Study. MATERIALS 16(8), p. 1 - 18, doi: 10.3390/ma16083203; FULL TEXT
(MAGNETRON, KRATOS-XPS) -
POLAT, Ö.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: The fabrication and characterization of half-Heusler YPdBi thin films. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS 161, p. 1 - 6, doi: 10.1016/j.jpcs.2021.110447; FULL TEXT
(MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, CRYOGENIC, LYRA) -
KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664; FULL TEXT
(ALD, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS) -
MANAKHOV, A.; PERMYAKOVA, E.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; SOLOMATINA, M.; BAIDYSHEV, V.; POPOV, Z.; JANŮ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; KOVALSKII, A.; SHEVEYKO, A.; KIRYUKHANTSEV-KORNEEV, P.; SHTANSKY, D.; NEČAS, D.; SOLOVIEVA, A., 2022: Biodegradable Nanohybrid Materials as Candidates for Self-Sanitizing Filters Aimed at Protection from SARS-CoV-2 in Public Areas. MOLECULES 27(4), doi: 10.3390/molecules27041333; FULL TEXT
(MAGNETRON, KRATOS-XPS) -
EHLICH, J.; MIGLIACCIO, L.; SAHALIANOV, I.; NIKIĆ, M.; BRODSKÝ, J.; GABLECH, I.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2022: Direct measurement of oxygen reduction reactions at neurostimulation electrodes. JOURNAL OF NEURAL ENGINEERING 19(3), p. 36045 - 15, doi: 10.1088/1741-2552/ac77c0; FULL TEXT
(KAUFMAN, MAGNETRON) -
Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS , p. 1 - 145; FULL TEXT
(VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200) -
Velič, A., 2022: Optical study of laser-induced magnetic phase transitions. BACHELOR´S THESIS , p. 1 - 42; FULL TEXT
(MAGNETRON, VERSALAB, KERR-MICROSCOPE, ULTRAFAST-LASER) -
MENDOSA-SANDOVAL, E.; RODRIGUEZ-LOPEZ, G.; ORDONEZ-ROMERO, C.; LAY, D.; QURESHI, N.; URBÁNEK, M.; SOLIS-IBARRA, D.; NOGUEZ, C.; LARA-GARCIA, H.; PIRRUCCIO, G., 2022: Shaping and enhancing the photoluminescence of halide perovskite quantum dots with plasmonic lattices. JOURNAL OF MATERIALS CHEMISTRY C , p. 3704 - 9, doi: 10.1039/d1tc05331k; FULL TEXT
(RAITH, MAGNETRON, RIE-CHLORINE, LYRA) -
Holobrádek, J., 2022: Low damping magnonic (meta)materials with enhanced control over local magnetic properties. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 26
(VERIOS, HELIOS, KERR-MICROSCOPE, MAGNETRON, KAUFMAN) -
POLAT, Ö.; MOHELSKÝ, I.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: An investigation of structural and magnetotransport features of half-Heusler ScPtBi thin films. MATERIALS RESEARCH BULLETIN 149, p. 111696-1 - 7, doi: 10.1016/j.materresbull.2021.111696; FULL TEXT
(MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, CRYOGENIC, LYRA) -
Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113; FULL TEXT
(VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA) -
Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER´S THESIS , p. 1 - 78; FULL TEXT
(MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN) -
VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: Spin-Wave Dispersion Measurement by Variable-Gap Propagating Spin-Wave Spectroscopy. PHYSICAL REVIEW APPLIED 16(5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033; FULL TEXT
(VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE) -
PRESSACCO, F.; SANGALLI, D.; UHLÍŘ, V.; KUTNYAKHOV, D.; ARREGI URIBEETXEBARRIA, J.; AGUSTSSON, S.; BRENNER, G.; REDLIN, H.; HEBER, M.; VASILYEV, D.; DEMSAR, J.; SCHÖNHENSE, G.; GATTI, M.; MARINI, A.; WURTH, W.; SIROTTI, F., 2021: Subpicosecond metamagnetic phase transition in FeRh driven by non-equilibrium electron dynamics. NATURE COMMUNICATIONS 12(1), p. 5088-1 - 8, doi: 10.1038/s41467-021-25347-3; FULL TEXT
(MAGNETRON, RIGAKU9, VERSALAB) -
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS , p. 1 - 100; FULL TEXT
(KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8, ICON-SPM) -
KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 122 - 5, doi: 10.37904/nanocon.2020.3692; FULL TEXT
(MAGNETRON, VERIOS, MPS150) -
MANAKHOV, A.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; ADAMENKO, L.; PERMYAKOVA, E.; BAIDYSHEV, V.; POPOV, Z.; BLAHOVÁ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; SOLOVIEVA, A., 2021: Electrospun Biodegradable Nanofibers Coated Homogenously by Cu Magnetron Sputtering Exhibit Fast Ion Release. Computational and Experimental Study. MEMBRANES 11(12), p. 1 - 19, doi: 10.3390/membranes11120965; FULL TEXT
(MAGNETRON, KRATOS-XPS, MIRA-STAN) -
KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KOLÍBALOVÁ, E.; MICHALIČKA, J.; MOZALEV, A., 2021: The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications. MATERIALS CHEMISTRY FRONTIERS 7(10), p. 1 - 13, doi: 10.1002/aelm.202100505; FULL TEXT
(TITAN, MAGNETRON, HELIOS, VERIOS) -
Hnilica, J., 2021: Deposition of low-damping metamagnetic thin films. BACHELOR´S THESIS , p. 1 - 57; FULL TEXT
(MAGNETRON, VERSALAB, VNA-MPI) -
Slavík, J., 2021: Patterning of excitable cells on multi-electrode arrays. PH.D. THESIS , p. 1 - 102; FULL TEXT
(DWL, EVAPORATOR, PARYLENE-SCS, RIE-FLUORINE, MAGNETRON, LEICACOAT-NANO, LYRA, ICON-SPM) -
Zadorozhnii, O., 2021: Exchange bias in metamagnetic heterostructures. MASTER´S THESIS , p. 1 - 81; FULL TEXT
(MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, UHV-DEPOSITION, UHV-PREPARATION, UHV-XPS, LYRA) -
MOZALEV, A.; PYTLÍČEK, Z.; KAMNEV, K.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E., 2021: Zirconium oxide nanoarrays via the self-organized anodizing of Al/Zr bilayers on substrates. MATERIALS CHEMISTRY FRONTIERS , p. 1917 - 15, doi: 10.1039/d0qm00862a; FULL TEXT
(MAGNETRON, KRATOS-XPS) -
Molnár, T., 2021: Magneto-optical imaging and analysis of magnetic domain microstructures. BACHELOR´S THESIS , p. 1 - 52; FULL TEXT
(MAGNETRON, KERR-MICROSCOPE) -
FOHLEROVÁ, Z.; KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Nanostructured Zirconium-Oxide Bioceramic Coatings Derived from the Anodized Al/Zr Metal Layers. ADVANCED MATERIALS INTERFACES 14(8), p. 1 - 14, doi: 10.1002/admi.202100256; FULL TEXT
(MAGNETRON, VERIOS) -
SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; MOZALEV, A., 2021: Dielectric properties of nanostructured mixed-oxide films formed by anodizing Al/Zr bilayers. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 44 - 6, doi: 10.37904/nanocon.2020.3693; FULL TEXT
(MAGNETRON, VERIOS) -
SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Superhydrophobic-Oleophobic Visible-Transparent Antireflective Nanostructured Anodic HfO2 Multifunctional Coatings for Potential Solar Panel Applications. ACS APPLIED NANO MATERIALS 4(2), p. 1754 - 12, doi: 10.1021/acsanm.0c03202; FULL TEXT
(MAGNETRON, RIE-FLUORINE, VERIOS, JAZ3-CHANNEL) -
Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS , p. 1 - 129; FULL TEXT
(TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM) -
Mohelský, I., 2020: Infrared magneto–spectroscopy of Bi2Te3 topological insulator. MASTER´S THESIS , p. 1 - 49
(FTIR, WOOLLAM-MIR, MAGNETRON, CRYOGENIC, KRATOS-XPS) -
Motyčková, L., 2020: Magnetic properties of self-assembled FeRh nanomagnets. MASTER´S THESIS , p. 1 - 90; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, VERIOS, KERR-MICROSCOPE, ICON-SPM) -
UHLÍŘ, V.; PRESSACCO, F.; ARREGI URIBEETXEBARRIA, J.; PROCHÁZKA, P.; PRŮŠA, S.; POTOČEK, M.; ŠIKOLA, T.; ČECHAL, J.; BENDOUNAN, A.; SIROTTI, F., 2020: Single-layer graphene on epitaxial FeRh thin films. APPLIED SURFACE SCIENCE 514, p. 145923-1 - 7, doi: 10.1016/j.apsusc.2020.145923; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9, UHV-LEEM, UHV-LEIS, UHV-SPM, UHV-PREPARATION, UHV-XPS, SIMS) -
KAMNEV, K.; PRÁŠEK, J.; MOZALEV, A., 2020: Anodic formation and SEM characterization of zirconium oxide nanostructured films. NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS , p. 631 - 636, doi: 10.37904/nanocon.2019.8711; FULL TEXT
(MAGNETRON) -
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM) -
ARREGI URIBEETXEBARRIA, J.; CAHA, O.; UHLÍŘ, V., 2020: Evolution of strain across the magnetostructural phase transition in epitaxial FeRh films on different substrates. PHYSICAL REVIEW B 101(17), p. 174413-1 - 14, doi: 10.1103/PhysRevB.101.174413; FULL TEXT
(MAGNETRON, VERSALAB, RIGAKU9) -
Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
(MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD) -
LEDNICKÝ, T.; BONYÁR, A., 2020: Large Scale Fabrication of Ordered Gold Nanoparticle-Epoxy Surface Nanocomposites and Their Application as Label-Free Plasmonic DNA Biosensors. ACS APPL MATER INTER 12(4), p. 4804 - 11, doi: 10.1021/acsami.9b20907; FULL TEXT
(MAGNETRON, RIE-FLUORINE, VERIOS, HELIOS, KRATOS-XPS, LYRA) -
Vojáček, L., 2019: Magneto-optical investigation of spintronic materials. BACHELOR´S THESIS , p. 1 - 51; FULL TEXT
(MAGNETRON, VERSALAB) -
Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER´S THESIS , p. 1 - 55
(MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, VERSALAB, ICON-SPM) -
Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
(MAGNETRON, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB, ICON-SPM) -
Konečný, A., 2019: Evaluation of Different Dielectrics For Mid-Infrared Waveguides. BACHELOR´S THESIS , p. 1 - 32; FULL TEXT
(MAGNETRON, PECVD, ALD, WOOLLAM-MIR) -
Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148
(MAGNETRON, FTIR, KRATOS-XPS, LYRA) -
HORÁK, M.; KŘÁPEK, V.; HRTOŇ, M.; KONEČNÁ, A.; LIGMAJER, F.; STÖGER-POLLACH, M.; ŠAMOŘIL, T.; PATÁK, A.; ÉDES, Z.; METELKA, O.; BABOCKÝ, J.; ŠIKOLA, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9, p. 1 - 11, doi: 10.1038/s41598-019-40500-1; FULL TEXT
(FTIR, HELIOS, MAGNETRON, SNOM-NANONICS, TITAN, LYRA) -
NEUGEBAUER, P.; BLOOS, D.; MARX, R.; LUTZ, P.; KERN, M.; AGUILA, D.; VAVERKA, J.; LAGUTA, O.; DIETRICH, C.; CLÉRAC, R.; VAN SLAGEREN, J., 2018: Ultra-broadband EPR spectroscopy in field and frequency domains. PHYSICAL CHEMISTRY CHEMICAL PHYSICS 20(22), p. 15528 - 7, doi: 10.1039/c7cp07443c; FULL TEXT
(MAGNETRON) -
Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
(DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE) -
ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
(MIRA-EBL, MAGNETRON, LYRA) -
Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR´S THESIS , p. 1 - 55
(MAGNETRON, CRYOGENIC, LYRA, ICON-SPM) -
BENDOVÁ, M.; KOLÁŘ, J.; GISPERT-GUIRADO, F.; MOZALEV, A., 2018: Porous-Alumina-Assisted Growth of Nanostructured Anodic Films on Ti-Nb Alloys. CHEMELECTROCHEM 5(19), p. 2825 - 11, doi: 10.1002/celc.201800785; FULL TEXT
(MAGNETRON, RIGAKU9, TITAN, KRATOS-XPS) -
PRESSACCO, F.; UHLÍŘ, V.; GATTI, M.; NICOLAOU, A.; BENDOUNAN, A.; ARREGI URIBEETXEBARRIA, J.; PATEL, S.; FULLERTON, E.; KRIZMANCIC, D.; SIROTTI, F., 2018: Laser induced phase transition in epitaxial FeRh layers studied by pump-probe valence band photoemission. STRUCTURAL DYNAMICS 5(3), p. 034501-1 - 11, doi: 10.1063/1.5027809; FULL TEXT
(MAGNETRON, RIGAKU9) -
CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
(RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3) -
Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
(RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3) -
Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
(TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA) -
Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 47
(MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, LYRA, ICON-SPM) -
Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
(MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER) -
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
(PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA) -
MANAKHOV, A.; MICHLÍČEK, M.; NEČAS, D.; POLČÁK, J.; MAKHNEVA, E.; ELIÁŠ, M.; ZAJÍČKOVÁ, L., 2016: Carboxyl-rich coatings deposited by atmospheric plasma co-polymerization of maleic anhydride and acetylene. SURFACE AND COATINGS TECHNOLOGY 295, p. 37 - 9, doi: 10.1016/j.surfcoat.2015.11.039; FULL TEXT
(FTIR, MAGNETRON, LYRA, ICON-SPM)
Photogallery
Rules for long term reservation
Magnetron can be booked for several days in a row, if necessary up to 4 days in 14 days. During the booked period, you will have a magnetron for yourself and no one else will be able to use it. If you find that your reservation is no longer needed, cancel it in the reservation system and inform other users. The use of the reserved time on the magnetron will be controlled by both guarantors & users.
Specification
3 DC sources | power up to 500W |
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1 RF source | power up to 300W |
8 targets | W, Au, FeRh, Pt, Co, Ta, Al, Ti please check the Loggbook for current targets in Magnetron |
loadlock | YES |
sample size | up to 4” |
rotation of substrate | YES |
substrate temperature | RT – 800 °C |
gas line for reactive deposition | O2 or N2 |
standard materials | Ag, Al, Au, B, Bi, C, Co, Cr, Cu, Gd, Fe, Hf, Mo, Mn, Nb, Ni, Pt, Ru, Si, Sb, Sc, Ta, Ti, W, Zr, TiN, TiO2, AlCuSi, NiCr, Ni80Fe20, Ir20Mn80, Fe75Co25, Fe50Rh50, Al2O3, SiO2, Co20Fe60B20 |
Additional cost Au + Pt | Self-service users have 15 nm of Pt and Au for free - everything above is 15 CZK/nm Full-service cost is 15 CZK/nm for academic and 20 CZK/nm for commercial projects |
Documents
Here is place for your documents.