Wide spectral range optical characterization of tantalum pentoxide (Ta 2 O 5 ) films by the universal dispersion model

Optical Materials Express

Franta, D.; Vohánka, J.; Dvořák, J.; Franta, P.; Ohlídal, I.; Klapetek, P.; Březina, J.; Škoda, D., 2025: Wide spectral range optical characterization of tantalum pentoxide (Ta 2 O 5 ) films by the universal dispersion model. OPTICAL MATERIALS EXPRESS 15(4), doi: 10.1364/OME.550708; FULL TEXT
(WOOLLAM-MIR, WOOLLAM-VIS, VUVAS)

Equipment:

• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE (WOOLLAM-MIR)
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)
• Vacuum ultraviolet spectrometer McPherson VUVAS 1000 (VUVAS)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Daniel Franta, Ph.D.
• Jan Dvořák, Ph.D.
• Petr Klapetek, Ph.D.