Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

VACUUM

NOVÁČEK, Z.; ZEZULKA, L.; KONEČNÝ, M.; PALOUDA, A.; VACEK, M.; KOLOMÝ, Š.; SPOUSTA, J.; SUPALOVÁ, L.; ČERNEK, O.; SPOUSTA, J.; ŠIKOLA, T., 2025: Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool. VACUUM 238, doi: 10.1016/j.vacuum.2025.114290; FULL TEXT

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Zdeněk Nováček, Ph.D.
• Lukáš Zezulka
• Martin Konečný
• Jiří Spousta
• Linda Supalová
• Prof. Jiří Spousta, Ph.D.
• Prof. Tomáš Šikola