Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy

Journal of Alloys and Compounds

Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
(DEKTAK, SIMS)

Equipment:

• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 (SIMS)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Petr Bábor, Ph.D.