Optical microscope Zeiss Axio Imager A2 (ZEISS-NANO)

Trinocular microscope for inspection of semiconductor optical analysis of samples (wafers), samples with lithographic structures with dimensions of structures from units of nm in order of microns. The microscope provides the following methods showing: incident light, bright field, dark field, polarization with lambda plate, C-DIC Nomarski contrast in circular polarization, TIC - interference method for measuring thin films with nanometer precision, and fluorescence.