Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy

Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: . REVIEW OF SCIENTIFIC INSTRUMENTS 94(5), doi: 10.1063/5.0139027; FULL TEXT
(RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)

Equipment:

• E-beam writer RAITH150 Two (RAITH)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)

Research Groups:

• CF: CEITEC Nano