Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid He-4

Journal of Low Temperature Physics

Midlik, Š.; Sadílek, J.; Xie, Z.; Huang, Y.; Schmoranzer, D., 2022: Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid He-4. JOURNAL OF LOW TEMPERATURE PHYSICS , doi: 10.1007/s10909-022-02675-2; FULL TEXT
(PECVD, RIE-FLUORINE, SUSS-MA8, SUSS-RCD8, EVAPORATOR, DWL, LYRA)

Equipment:

• Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (PECVD)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Resist coating and development system SÜSS MicroTec RCD8 (SUSS-RCD8)
• Electron beam evaporator BESTEC (EVAPORATOR)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• Advanced Polymers and Composites
• CF: CEITEC Nano