Application of the focused ion and electron beam in nanotechnologies

Ph.D. Thesis

Šamořil, T., 2015: Application of the focused ion and electron beam in nanotechnologies. PH.D. THESIS , p. 1 - 126
(FTIR, LYRA)

Equipment:

• Vacuum FTIR Vertex70v + microscope Hyperion 3000 KIT - polarizors (FTIR)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano