Ion irradiation-induced localized stress relaxation in W thin film revealed by cross-sectional X-ray nanodiffraction

Thin Solid Films

Hlushko, K.; Mackova, A.; Zalesak, J.; Burghammer, M.; Davydok, A.; Krywka, C.; Daniel, R.; Keckes, J.; Todt, J., 2021: Ion irradiation-induced localized stress relaxation in W thin film revealed by cross-sectional X-ray nanodiffraction. THIN SOLID FILMS 722, doi: 10.1016/j.tsf.2021.138571
(HELIOS)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)

Research Groups:

• CF: CEITEC Nano