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Nanometer - Thick titanium film as a silicon migration barrier
MATERIALS TODAY COMMUNICATIONS
FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; TRUNEC, M.; SOBOLA, D.; MOUSA, M., 2024: Nanometer - Thick titanium film as a silicon migration barrier. MATERIALS TODAY COMMUNICATIONS 40, p. 1 - 17, doi: 10.1016/j.mtcomm.2024.109326; FULL TEXT
(KRATOS-XPS, WITEC-RAMAN, ICON-SPM, EVAPORATOR)
Equipment:
- X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
- Witec Alpha 300R (WITEC-RAMAN)
- Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)
- Electron beam evaporator BESTEC (EVAPORATOR)
Research Groups:
CEITEC authors: