Integration of nanostuctures into functional devices

Master´s Thesis

Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
(MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Witec Alpha 300R (WITEC-RAMAN)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• 4-probe station Cascade Microtech MPS 150 (MPS150)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Daniel Citterberg