Anodic formation of HfO2 nanostructure arrays for resistive switching application

12th International Conference on Nanomaterials - Research and Application (NANOCON)

KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 122 - 5, doi: 10.37904/nanocon.2020.3692; FULL TEXT
(MAGNETRON, VERIOS, MPS150)

Equipment:

• Magnetron sputtering system BESTEC (MAGNETRON)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• 4-probe station Cascade Microtech MPS 150 (MPS150)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Jan Prášek, Ph.D.