Vertical graphene growth on AlCu4Mg alloy by PECVD technique

Coatings

Polzer, A.; Sedlak, J.; Sedlacek, J.; Benes, L.; Mouralova, K., 2021: Vertical graphene growth on AlCu4Mg alloy by PECVD technique. COATINGS 11(9), doi: 10.3390/coatings11091108; FULL TEXT
(PECVD-NANOFAB, TITAN, HELIOS, ICON-SPM)

Equipment:

• High temperature plasma enhanced chemical vapour deposition system on C-based materials Oxford Instruments Plasma Technology NanoFab (PECVD-NANOFAB)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano