Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics

Carbon

Gruber, D. P.; Todt, J.; Wöhrl, N.; Zalesak, J.; Tkadletz, M.; Kubec, A.; Niese, S.; Burghammer, M.; Rosenthal, M.; Sternschulte, H.; Pfeifenberger, M. J.; Sartory, B.; Keckes, J., 2019: Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics. CARBON 144, p. 666 - 674, doi: 10.1016/j.carbon.2018.12.093
(HELIOS)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)

Research Groups:

• CF: CEITEC Nano