Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications

Bachelor´s thesis

Jarušek, J., 2022: Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications. BACHELOR´S THESIS , p. 1 - 75; FULL TEXT
(DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200)

Equipment:

• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• RIE by Chlorine Chemistry Oxford Instruments Plasma Technology PlasmaPro 100 (RIE-CHLORINE)
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
• Keithley 4200-SCS Parameter Analyzer (KEITHLEY-4200)

Research Groups:

• CF: CEITEC Nano