Mechanically robust hydrophobic fluorine-doped diamond-like carbon film on glass substrate

Sharifahmadian, O.; Pakseresht, A.; Mirzaei, S.; Eliáš, M.; Galusek, D., 2023: . DIAMOND AND RELATED MATERIALS 138, doi: 10.1016/j.diamond.2023.110252; FULL TEXT
(VERIOS, SEE-SYSTEM, NANOINDENTER, RIE-FLUORINE, KRATOS-XPS)

Equipment:

• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• See System E Advex Instruments (SEE-SYSTEM)
• Hysitron TI 950 (NANOINDENTER)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Saeed Mirzaei, Ph.D.
• Marek Eliáš, Ph.D.