Atomic Layer Deposition of MoSe2 Using New Selenium Precursors

FLATCHEM

ZAZPE MENDIOROZ, R.; CHARVOT, J.; KRUMPOLEC, R.; HROMÁDKO, L.; PAVLIŇÁK, D.; DVOŘÁK, F.; KNOTEK, P.; MICHALIČKA, J.; PŘIKRYL, J.; NG, S.; JELÍNKOVÁ, V.; BUREŠ, F.; MACÁK, J., 2020: Atomic Layer Deposition of MoSe2 Using New Selenium Precursors. FLATCHEM 21, p. 1 - 10, doi: 10.1016/j.flatc.2020.100166; FULL TEXT
(TITAN)

Equipment:

• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)

Research Groups:

• CF: CEITEC Nano
• Advanced Low-Dimensional Nanomaterials

CEITEC authors:

• Dr. Raúl Zazpe Mendioroz
• Jan Michalička
• M.Sc. Siow Woon Ng, Ph.D.
• Dr. Ing. Jan Macák