Enhanced permeability dielectric FeCo/Al2O3 multilayer thin films with tailored properties deposited by magnetron sputtering on silicon

AIP ADVANCES

Falub, C.V.; Pietambaram, S.V.; Yildirim, O.; Meduna, M.; Caha, O.; Hida, R.; Zhao, X.; Ambrosini, J.; Rohrmann, H.; Hug, H.J., 2019: Enhanced permeability dielectric FeCo/Al2O3 multilayer thin films with tailored properties deposited by magnetron sputtering on silicon. AIP ADVANCES 9(3), p. 035243-1 - 035243-6, doi: 10.1063/1.5079477
(RIGAKU9)

Equipment:

• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Ondřej Caha, Ph.D.