Microfabricated ferromagnetic-shape-memory Heuslers: The geometry and size effects
APPLIED MATERIALS TODAY
GHAHFAROKHI, M.; ARREGI URIBEETXEBARRIA, J.; CASOLI, F.; HORKÝ, M.; CABASSI, R.; UHLÍŘ, V.; ALBERTINI, F., 2021: Microfabricated ferromagnetic-shape-memory Heuslers: The geometry and size effects. APPLIED MATERIALS TODAY 23, p. 101058-1 - 11, doi: 10.1016/j.apmt.2021.101058; FULL TEXT
(VERSALAB, RIGAKU9, KERR-MICROSCOPE, SUSS-MA8, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, VERIOS)
Equipment:
- Cryogenic-free VSM and ETO measurement system – Quantum Design, VersaLab (VERSALAB)
- X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
- Magneto-optical Kerr microscope (KERR-MICROSCOPE)
- Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
- Electron beam evaporator BESTEC (EVAPORATOR)
- Wire bonder TPT HB 16 (WIRE-BONDER)
- High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
Research Groups:
CEITEC authors: