Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics

Ph.D. Thesis

Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
(MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD, LYRA)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano