Electron beam directed etching of hexagonal boron nitride

NANOSCALE

ELBADAWI, C.; TRAN, T.; KOLÍBAL, M.; ŠIKOLA, T.; SCOTT, J.; CAI, Q.; LI, L.; TANIGUCHI, T.; WATANABE, K.; TOTH, M.; AHARONOVICH, I.; LOBO, C., 2016: Electron beam directed etching of hexagonal boron nitride. NANOSCALE 8(36), p. 16182 - 5, doi: 10.1039/c6nr04959a; FULL TEXT
(NANOSAM)

Equipment:

• nanoScanning Auger Microscopy/ Scanning electron microscopy with polarization analysis Scienta Omicron nanoSAM Lab (NANOSAM)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Miroslav Kolíbal, Ph.D.
• Prof. Tomáš Šikola