Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

SCIENTIFIC REPORTS

HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
(TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)

Equipment:

• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Michal Horák, Ph.D.
• Kristýna Bukvišová
• Vojtěch Švarc, Ph.D.
• Vlastimil Křápek, Ph.D.
• Prof. Tomáš Šikola