Selectively arranged single-wire based nanosensor array systems for gas monitoring

NANOSCALE

CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
(RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)

Equipment:

• E-beam writer RAITH150 Two (RAITH)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• Magnetron sputtering system BESTEC (MAGNETRON)
• Ion beam etching Scia Systems Coat 200 (SCIA)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• X-ray powder diffractometer Rigaku SmartLab 3kW (RIGAKU3)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Prof. Jaromír Hubálek, Ph.D.
• Jakub Somer