Investigation of deep levels in semi-insulating vanadium-doped 4H-SiC by photocurrent spectroscopy

Rejhon, M.; Brynza, M.; Grill, R.; Belas, E.; Kunc, J., 2021: . PHYSICS LETTERS A 405, doi: 10.1016/j.physleta.2021.127433; FULL TEXT
(FTIR-CHEMLAB, SIMS)

Equipment:

• Vacuum FTIR Vertex70v + microscope Hyperion 3000 (FTIR-CHEMLAB)
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 (SIMS)

Research Groups:

• CF: CEITEC Nano