Gas sensors based on 1D and 2D materials

Master´s Thesis

Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER´S THESIS , p. 1 - 84; FULL TEXT
(DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, RIE-FLUORINE, DRIE, LYRA, ICON-SPM)

Equipment:

• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
• Resist coating and development system SÜSS MicroTec RCD8 (SUSS-RCD8)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Electron beam evaporator BESTEC (EVAPORATOR)
• 4-probe station Cascade Microtech MPS 150 (MPS150)
• Witec Alpha 300R (WITEC-RAMAN)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (DRIE)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Jan Brodský