Magnetic vortex based memory device

Ph.D. Thesis

Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS , p. 1 - 100; FULL TEXT
(KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8, ICON-SPM)

Equipment:

• Magneto-optical Kerr microscope (KERR-MICROSCOPE)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• E-beam writer RAITH150 Two (RAITH)
• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Magnetron sputtering system BESTEC (MAGNETRON)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• Resist coating and development system SÜSS MicroTec RCD8 (SUSS-RCD8)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano