CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy
Švarc, V., 2015: . MASTER'S THESIS , p. 1 - 50
(ALD-FIJI, DIENER, WIRE-BONDER, LYRA)
Equipment:
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
- Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
- Wire bonder TPT HB 16 (WIRE-BONDER)
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
Research Groups: