Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy

Master´s Thesis

Švarc, V., 2015: Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy. MASTER´S THESIS , p. 1 - 50
(ALD, DIENER, WIRE-BONDER, LYRA)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano