Field emission properties of sharp tungsten cathodes coated with a thin resilient oxide barrier

International Vacuum Nanoelectronics Conference

Burda, D.; Allaham, M.M.; Knapek, A.; Sobola, D.; Mousa, M.S., 2021: Field emission properties of sharp tungsten cathodes coated with a thin resilient oxide barrier. INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE , p. 178 - 179, doi: 10.1109/IVNC52431.2021.9600704; FULL TEXT
(ALD)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Dinara Sobola, Ph.D.