Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor

CARBON

ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor. CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471; FULL TEXT
(RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)

Equipment:

• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Wire bonder TPT HB 16 (WIRE-BONDER)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• Development of Methods for Analysis and Measuring
• CF: CEITEC Nano

CEITEC authors:

• Vojtěch Švarc, Ph.D.
• Miroslav Bartošík, Ph.D.
• Martin Konečný
• Jakub Piastek, Ph.D.
• David Nezval, Ph.D.
• Jindřich Mach, Ph.D.
• Prof. Tomáš Šikola