CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Analysis and characterisation of spirally–arranged field–emission nanostructure
Ondříšková, M., 2022: . BACHELOR'S THESIS , p. 1 - 56; FULL TEXT
(VERIOS, DRIE, KRATOS-XPS)
Equipment:
- High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
- Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (DRIE)
- X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
Research Groups: