In-depth Analysis of 10 nm Exynos Processor using Micro CT and FIB-SEM System

IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits

SHARANG, S.; DLUHOŠ, J.; KALASOVÁ, D.; DENISYUK, A.; VÁŇA, R.; ZIKMUND, T.; KAISER, J.; OBONA, J., 2019: In-depth Analysis of 10 nm Exynos Processor using Micro CT and FIB-SEM System. IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS ; FULL TEXT
(micro-CT-L240)

Equipment:

• GE phoenix v|tome|x L240 (micro-CT-L240)

Research Groups:

• CF: CEITEC Nano
• Advanced Instrumentation and Methods for Materials Characterization

CEITEC authors:

• Tomáš Zikmund, Ph.D.
• Prof. Jozef Kaiser, Ph.D.