MEMS microhotplate platform for chemical sensors

Master´s Thesis

Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
(DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)

Equipment:

• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Magnetron sputtering system BESTEC (MAGNETRON)
• Electron beam evaporator BESTEC (EVAPORATOR)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• 4-probe station Cascade Microtech MPS 150 (MPS150)
• RIE by Chlorine Chemistry Oxford Instruments Plasma Technology PlasmaPro 100 (RIE-CHLORINE)

Research Groups:

• CF: CEITEC Nano